Abstract
The goal of this research is to implement a PC-based remote control system of ion implanter using Visual Basic programming. Presently, skilled process engineers are required to regularly setup and adjust implanter parameters. Any reduction in the number of production hours devoted to ion beam implanter setup or recalibration after a species change would represent substantial improvements in both manpower and equipment utilization. An optical communication system for the remote control and telemetry in the operation of the 50kev potential was designed and constructed. This system enables continuous and safe operation of the ion implanter and can be the basis for the automation. The isolation characteristics of optical fiber were 10kV/cm, and performance tests of the system under the intense noise environment during the implanter operations showed satisfactory results. This system is designed to completely replace the existing human-machine interface with many new functions. This paper describes the important components of the system including system architecture and software development. It is expected that this system can be used for the communication and control purpose in the high noise environments such as the operation of the MeV energy implanter or other high power, high noise systems.
