Journal of the Korea Institute of Information and Communication Engineering (한국정보통신학회논문지)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Low Actuation Voltage RF MEMS Switch

저전압 고주파 MEMS 스위치

  • 서용교 (삼성종합기술원) ;
  • 최영식 (부경대학교 전자컴퓨터정보통신 공학부)
  • Published : 2003.10.01
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Abstract

A capacitive-coupled configuration MEMS switch is designed and fabricated, and its characteristics are measured. Low actuation voltage has been achieved by means of small distance between signal line and membrane. Minimum actuation voltage is about 11V. Isolation is around 40dB and insertion loss is about 0.2dB at 2GHz.

Capacitive-coupled 구조의 RF MEMS 스위치를 설계하여 제작하였으며, 특성을 측정하였다. 낮은 구동 전압은 membrane과 신호선 사이의 간격을 작게 만들어 구현하였다. 제작된 스위치의 구동 전압은 최저 11V이며, 2GHz에서 측정한 고주파 특성은 삽입 손실이 0.2dB이고 절연 특성은 40dB이다.

Keywords

References

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