Abstract
In this paper, we addressed a modeling for the magnetic levitation stage. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for propulsion. Therefore. this stage can generate six degrees of freedom motion by the combination of forces. We derived a mechanical dynamics equation using Lagrangian method and electromechanical dynamics equation by using Co-energy method. Based on the derived dynamics, we can analyze the stage motion that is subject to the input currents and forces.
