참고문헌
- F. N. Goodall, R. A. Moody, and W. T. Welford, “Reduction photolithography by ablation at wavelength 193nm,” Optical communications, vol. 57, pp. 227-229, 1986. https://doi.org/10.1007/s003390051419
- R. Srinivasan, “Ablation of polymers and biological tissue by ultraviolet lasers, Science,” Science, vol. 234, pp. 559-565, 1986. https://doi.org/10.1126/science.3764428
- V. Oliveira, O. Conde, and R. Vilar, “UV Laser Micromachining of Ceramic Materials: Formation of Columnar Topographies,” Advanced engineering materials, Vol. 3, No.1/2, pp.75-81, 2001. https://doi.org/10.1002/1527-2648(200101)3:1/2<75::AID-ADEM75>3.0.CO;2-Z
- B. N. Chichkov, C. Momma, S. Nolte, F. v. Alvensleben, and A. Tunnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Applied Physics A, vol. 63, pp. 109-115. 1996. https://doi.org/10.1007/BF01567637
- C. Momma, B. N. Chichkov, S. Nolte, F. v. Alvensleben, A. Tunnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Optics communications, vol. 129, pp. 134-142, 1996. https://doi.org/10.1016/0030-4018(96)00250-7
- C. Momma, S. Nolte, B. N. Chichkov, F. V. Alvenseben, and A. Tunnermann, “Precise laser ablation with ultrashort pulses,” Applied surface science, vol. 109/110, pp. 15-19, 1997. https://doi.org/10.1016/S0169-4332(96)00613-7
- F. Korte, S. Nolte, B. N. Chichkov, T. Bauer, G. Kamlage, T. Wagner, C. Fallnich, and H. Welling, “Far-field and near-field material processing with femtoseond laser pulses,” Applied physics A Materials science & processing, Vol. 69, No. 7, pp. S7-S11, 1999. https://doi.org/10.1007/s003390051346
- H. Varel, D. Ashkenasi, A. Rosenfeld, and M. Wahmer, “Micromachining of quartz with ultrashort laser pulses,” Applied physics A, vol. 65, pp. 367-373, 1997. https://doi.org/10.1007/s003390050593
- J. Kr¨uger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Applied surface science, vol. 127-129, pp. 892-898, 1998. https://doi.org/10.1016/S0169-4332(97)00763-0
- S. Preuss, A. Demchuk, and M. Stuke, “Subpicosecond UV laser ablation of metals,” Applied physics, vol. 61, pp 33-37, 1995. https://doi.org/10.1007/BF01538207
- Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, and W. Weaver, “Femtosecond laser microstructuring of materials,” Applied surface science, vol. 127-129, pp. 875-880, 1998. https://doi.org/10.1016/S0169-4332(97)00760-5
- M. Kawachi, “Recent progress in silica-based planar lightwave circuits on silicon,” IEE Proc.- Optoelectron., vol. 143, pp. 257-262, 1996. https://doi.org/10.1049/ip-opt:19960493
- S. I. Anisimov, M. I. Tribel'skii, and Ya,G. Epel'baum, Sov. Phys., JETP 51, pp. 802-807, 1980.
- Y. Hibino, F. Hanawa, H. Nakagome, M. Ishi, and N. Takato, “High reliability optical splitters composed of silica-based planar lightwave circuits,” Journal of lightwave technology, vol. 13, pp. 1728-1735, 1995. https://doi.org/10.1109/50.405317
- A. Sugita, K. Onose, Y. Ohmori, and M. Yasu, “Optical fiber coupling to single-mode silica-based planar lightwaveguide circuits with fiber-guiding grooves,” Fiber and integrated optics, vol. 12, pp. 347-354, 1993. https://doi.org/10.1080/01468039308204235
-
C. Buerhop, B. Blumenthal, R. Weissmann, N. Lutz, and S. Biermann, “Glass surface treatment with excimer and
$CO_2$ lasers,” Applied surface science, vol. 46, pp. 430-434, 1990. https://doi.org/10.1016/0169-4332(90)90184-2 - B. C. Choi, J. H. Choi, H. I. Lee, C. S. Park, and M. S. Lee, “The development of packaging technique in 1 × 8 optical splitter using the passive alignment method,” in Proceedings of photonics conference '02, pp. 703, 2002.
- B. C. Choi, J. H. Choi, H. I. Lee, C. S. Park, and M. S. Lee, “The Passive alignment technique of fiber-towaveguide,” in ICEP, '03, pp. 122-126, 2003.