E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제16권9호
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- Pages.65.1-65
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- 2003
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Interfacial properties of ZrO$_2$ on silicon
- Lin, Y.S. (Dept. of Chem. Engineering, University of California) ;
- Puthenkovilakam, R. (Dept. of Chem. Engineering, University of California) ;
- Chang, J.P. (Dept. of Chem. Engineering, University of California)
- 발행 : 2003.09.01
초록
The interface of zirconium oxide thin films on silicon is analyzed in detail for their potential applications in the microelectronics. The formation of an interfacial layer of ZrSi
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