Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 16 Issue 9
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- Pages.61.1-61
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- 2003
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Dielectric property and conduction mechanism of ultrathin zirconium oxide films
- Chang, J.P. (Dept. of chemical Engineering, University of California) ;
- Lin, Y.S. (Dept. of chemical Engineering, University of California)
- Published : 2003.09.01
Abstract
Stoichiometric, uniform, amorphous ZrO
Keywords