International Journal of Precision Engineering and Manufacturing

  • 제4권5호
  • /
  • Pages.22-26
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  • 2003
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Fabrication of Micro/Nano-patterns using MC-SPL(Mechano-Chemical Scanning Probe Lithography) Process

  • Sung, In-Ha (Dept. of Mechanical Engineering, Graduate School of Yonsei University) ;
  • Kim, Dae-Eun (School of Mechanical Engineering, Yonsei University)
  • 발행 : 2003.09.01
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초록

In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

키워드

참고문헌

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