Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Si(100) Surface Structure Studied by Time-Of-Flight Impact-Collision ton Scattering Spectroscopy

비행시간형 직충돌 이온산란 분광법을 이용한 Si(100) 면의 구조해석

  • Hwang, Yeon (Department of Materials Science and Engineering, Seoul National University of Technology) ;
  • Lee, Tae-Kun (Department of Materials Science and Engineering, Seoul National University of Technology)
  • 황연 (서울산업대학교 신소재공학과) ;
  • 이태근 (서울산업대학교 신소재공학과)
  • Published : 2003.08.01
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Abstract

Time-Of-flight Impact-Collision Ion Scattering Spectroscopy (TOF-ICISS) using 2 keV He$\^$+/ ion was applied to study the geometrical structure of the Si(100) surface. The scattered ion intensity was measured along the [011] azimuth varying the incident angle. The focusing effects were appeared at the incident angles of 20$^{\circ}$, 28$^{\circ}$, 46$^{\circ}$, 63$^{\circ}$, and 80$^{\circ}$. The Si atomic position was simulated by calculating the shadow cone to explain the five focusing effects. The four focusing effects at 28$^{\circ}$, 46$^{\circ}$, 63$^{\circ}$, and 80$^{\circ}$ resulted from the {011} surface where no dimers existed on the outermost surface. On the contrary, the scattering between two Si atoms in a dimer resulted in the focusing peak at 20$^{\circ}$.

2 keV의 저에너지 He$^{+}$ 이온을 사용한 비행시간형 직충돌 이온산란 분광법을 이용하여 Si(100) 표면의 원자구조를 해석하였다. [011] 방위를 따라 이온빔을 입사시키고, 입사 각도에 따른 산란된 이온의 강도를 측정하였다. 20$^{\circ}$, 28$^{\circ}$, 46$^{\circ}$, 63$^{\circ}$, 80$^{\circ}$등의 5가지 입사각도에서 집속 효과가 일어났다. 이 각도를 설명하기 위해 그림자 원뿔을 계산하여 원자의 위치를 모사하였으며, 이 결과는 실험과 잘 일치하였다. 28$^{\circ}$, 46$^{\circ}$, 63$^{\circ}$ 및 80$^{\circ}$에서 일어나는 4개의 집속 효과는 표면 최외층에서 이 합체가 자리하지 않는 {011}면을 따라서 발생한 것이며 벌크 구조가 반영된 결과이다. 그 반면에 이합체를 이루는 원자사이에서 발생한 산란은 20$^{\circ}$에서 집속 효과를 나타내었다.

Keywords

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