Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Surface Morphology, Microstructure and Mechanical Properties of Thin Ag Films

  • Shugurov, Artur (Institute of Strength Physics and Materials Science SB RAS) ;
  • Panin, Alexey (Institute of Strength Physics and Materials Science SB RAS) ;
  • Chun, Hui-Gon (ReMM, School of Materials Science and Engineering, University of Ulsan) ;
  • Oskomov, Konstantin (Institute of High Current Electronics SB RAS, Tomsk, Russia)
  • Published : 2003.06.01
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Abstract

Thin Ag films deposited onto $SiO_2/Si$ substrates by DC magnetron sputtering and thereafter annealed ,it temperatures 100-50$0^{\circ}C$ are investigated by scanning tunneling and atomic forte microscopy. It is shown that the film surface topography and microstructure are considerably changed as a result of annealing. To provide a quantitative estimation of the surface topography changes of Ag films the surface fractal dimension was calculated. Elasticity and hardness of the films are studied by a nanoindentation technique. The films are found to have value of elastic modulus close to that of bulk silver while their hardness and yield stress are essentially higher.

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