한국광학회지 (Korean Journal of Optics and Photonics)

  • 제14권3호
  • /
  • Pages.327-330
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  • 2003
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  • 1225-6285(pISSN)
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  • 2287-321X(eISSN)
한국광학회 (Optical Society of Korea)
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Butt-coupled DBR-LD제작 및 동작특성

Fabrication and lasing characteristics of tunable Butt-coupled DBR-LD

  • 오수환 (한국전자통신연구원 반도체 원천기술연구소) ;
  • 이철욱 (한국전자통신연구원 반도체 원천기술연구소) ;
  • 김기수 (한국전자통신연구원 반도체 원천기술연구소) ;
  • 이지면 (한국전자통신연구원 반도체 원천기술연구소) ;
  • 고현성 (한국전자통신연구원 반도체 원천기술연구소) ;
  • 박상기 (한국전자통신연구원 반도체 원천기술연구소) ;
  • 박문호 (한국전자통신연구원 반도체 원천기술연구소)
  • 발행 : 2003.06.01
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⟨ 이전 논문 다음 논문 ⟩

초록

본 논문에서는 도파로층이 1.3 $\mu\textrm{m}$ InGaAsP긴 파장 가변 BT(butt-coupled)-DBR(distributed bragg reflector)-LD(laser diode)를 제작하고, 특성을 측정하였다. Butt 결합 성장면의 성장조건을 건식식각과 선택식각 방법과 MOCVD(metal organic chemical vapor deposition)성장으로 최적화 한 후 활성층과 도파로층의 결합 효율을 측정한 결과 결합 효율이 85% 이상으로 나타났으며, 제작된 BT-DBR-LD에 연속전류를 인가 했을 때, 평균 임계전류는 약 21 ㎃, 최대 광출력이 25 ㎽ 이상으로 나타났다. 또한 위상제어 영역과 DBR영역에 각각 25㎃와 50 ㎃의 전류를 주입하여도 급격한 광출력 변화와 포화현상이 나타나지 않았다 이때 최대 파장 가변 폭은 7.4 nm, SMSR비는 40 ㏈이상으로 나타났다.

We present the fabrication and measured performance of a wavelength tunable Butt coupled DBR-LD. An average coupling efficiency between active layer and passive waveguide layer was measured over 85％per facet, and the average threshold current was 21 ㎃ for the waveguide integrated DBR laser. High output power of Butt coupled DBR-LD was obtained over 25 ㎽. As high as 25 ㎽ of output power was achieved by the butt coupled method. The maximum wavelength tuning range is about 7.4 nm, and the side mode suppression ratio was more than 40 ㏈ using 1.3 ${\mu}{\textrm}{m}$ InGaAsP waveguide layer.

키워드

참고문헌

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