Abstract
Triangulation method, conoscopic holography method and interferometry method are analyzed for effective measurement of micro burr geometry, which is formed in micro drilling. To select proper sensor, the cross section of a cylinder with 0.5mm diameter is measured and the result shows that conoscopic holography method is effective for measuring highly inclined surface in cylinder. Burrs with 1.0mm and 30${\mu}{\textrm}{m}$ height are measured by three suggested methods. As a result, the conoscopic holography method is proved to be most proper in measuring burr geometry. Burr measurement system is developed, which consists of conoscopic laser sensor, X-Y table, controller and burr measurement program. Burrs can be measured automatically and the result is displayed in 3D shape
