Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Microstructure and Electrical Properties of SnO2 Thin Films Grown by Thermal CVD Method

열 CVD법으로 증착된 SnO2 박막의 미세구조와 전기적 특성

  • 정진 (조선대학교 물리학과) ;
  • 최승평 (조선대학교 물리학과) ;
  • 신동찬 (조선대학교 신소재공학과) ;
  • 구재본 (삼성 SDI 중앙연구소 개발1팀) ;
  • 송호준 (한국기초과학지원 연구원 광주 분소) ;
  • 박진성 (조선대학교 신소재공학과)
  • Published : 2003.05.01
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Abstract

When a SnO$_2$ thin film was deposited by thermal CVD, two different types of growth behavior that were dependent on the deposition temperature were observed. The film grown at 475$^{\circ}C$ had a wide grain size distribution and a faceted surface shape. On the other hand, the film grown at 5$25^{\circ}C$ had a relatively narrow grain size distribution and a rounded sulfate shape. The aspects of grain shape and growth behavior agree well with the theory of gram growth and a roughening transition. The charge tarrier density decreased with deposition time. According to photoluminescence measurements, the peak intensity of the spectra occurred at approximately 2.5 eV, which is related to oxygen vacancies, and decreased with increasing of deposition time. These measurement results suggest that the number of oxygen vacancies, which is related to the electrical conductivity, decrease with deposition time.

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References

  1. 전기전자재료학회논문지 v.3 no.4 가스 감지소자의 감지특성(Ⅱ) 최순돈;이상기;김규호
  2. 전기전자재료학회논문지 v.8 no.3 박막형 SnO₂가스센서 특성에 관한 연구 김상연;송준태;
  3. J. Electrochem. Physical Soc. v.123 Properties of SnO₂ materials Z.M.Jarzebski;J.P.Maration https://doi.org/10.1149/1.2133010
  4. Thin Solid Films v.193/194 Electrical and optical properties of sprayed SnO₂films V.Vasu;A.Subrahmanyam https://doi.org/10.1016/0040-6090(90)90252-9
  5. J. Mater. Sci. v.21 Preparation and properties of antimony doped SnO₂films by thermal decomposition of tin 2 ethyhexanoate A.Tsunashima https://doi.org/10.1007/BF00551480
  6. Jpn. J. Appl. Phys. v.19 Preapration of fast detecting SnO₂ gas sensors H.Pink;L.Treitinger;L.Vite https://doi.org/10.1143/JJAP.19.513
  7. Thin Solid Films v.169 A tin oxide thin films sensor with high ethanol sensitivity Y.K.Fang;J.J.Lee https://doi.org/10.1016/S0040-6090(89)80004-5
  8. The Stannic Oxide Gas Sensor Principles and Applications K.Ihokura;J.Watson
  9. J. Kor. Ceram. Soc. v.34 Effect of sintering atmosphere and dopant addition on the densification of SnO₂ ceramics J.I.Jung;B.C.Kim;S.H.Chang;J.J.Kim
  10. Metall. Mater. Trans. A v.32 Abnormal grain growth in bulk Cu-the dependence on initial grain size and annealing temperature J.B.Koo;D.Y.Yoon https://doi.org/10.1007/s11661-001-0004-2
  11. J. Am. Cer. Soc. v.83 Effect of SiO₂,CaO₂,and MgO additions on the grain growth of alumina C.W.Park;D.Y.Yoon https://doi.org/10.1111/j.1151-2916.2000.tb01596.x
  12. Acta Mater. v.48 Abnormal grain growth and grain boundary faceting in a model Ni-base superalloy S.B.Lee;D.Y.Yoon;M.F.Henry https://doi.org/10.1016/S1359-6454(00)00119-1
  13. Z. Metallkd. v.92 The dependence of abnormal grain growth on initial grain size in 316L stainless steel S.H.Lee;J.S.Choi;D.Y.Yoon
  14. Thin Solid Films v.401 Surface smoothing and roughening in sputtered SnO₂films T.Lindstrom;J.Isidorsson;G.A.Niklasson https://doi.org/10.1016/S0040-6090(01)01689-3
  15. 한국재료학회지 v.6 Spray pyrolysis 방법으로 증착된 SnO₂박막의 전기 및 광학적 특성 김혜동;박민수;이범주;안병태
  16. J. Vac. Sci. Technol. A v.13 Origin of intrinsic stress in $Y_{2}O_{3}$ films deposited by reactive sputtering H.M.Choi;S.K.Choi https://doi.org/10.1116/1.579713
  17. Thin Solid Films v.358 Influence of film density on residual stress and resistivity for Cu thin films deposited by bias sputtering H.M.Choi;S.K.Choi;O.Anderson;K.Bange https://doi.org/10.1016/S0040-6090(99)00709-9
  18. Mat. Sci. Semicon. Proc. v.4 Dependence of electrical and optical properties of ZnO films on substrate temperature X.L.Xu;S.P.Lau;J.S.Chen;Z.Sun;B.K.Tay;J.W.Chai https://doi.org/10.1016/S1369-8001(02)00029-X