Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Friction Properties of Carbon Coated Ultra-thin Film using Taguchi Experimental Design

다구찌 실험계획법을 이용한 탄소코팅 초박막의 마찰특성

  • 안준양 (연세대학교 대학원 기계공학과) ;
  • 김대은 (연세대학교 기계공학부) ;
  • 최진용 (한국과학기술연구원 미래기술연구본부 나노소자연구센터) ;
  • 신경호 (한국과학기술연구원 미래기술연구본부 나노소자연구센터)
  • Published : 2003.04.01
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Abstract

Frictional properties of ultra-thin carbon coatings on silicon wafer were investigated based on Taguchi experimental design method. Sensitivity analysis was performed with normal load, relative humidity, deposition process, and coating thickness as the variables. It was found that despite low thickness, the carbon coating resulted in relatively low friction coefficient. Also, the frictional behavior was affected significantly by humidity and normal load.

Keywords

References

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