References
- Steve Chen, S. J. and Busch-Vishiniac, I. J., 'A magnetically levitated, automated, contact analytical probe tool,' IEEE Transaction on Semiconductor Manufacturing, Vol. 8, No.1, pp. 72-78,1995 https://doi.org/10.1109/66.350759
- Jung, K. S. and Baek, Y. S., 'Design, modeling, and control of a novel six d.o.f positiong system using magnetic levitation,' IEICE Trans. on Electronics, Vol. E83-C, No. 12, pp. 1937-1949, 2001
- 정광석, 백윤수, '전자기력 제어를 이용한 6 자유도 초정밀 스테이지,' 한국정밀공학회지, 제 17권, 제 3호, pp. 158-164, 2000
- Holmes M., Hocken R. and Trumper D., 'The longrange scanning stage: a novel platform for scannedprobe microscopy,' Precision engineering, Vol. 24, pp. 191-209, 2000 https://doi.org/10.1016/S0141-6359(99)00044-6
- Jeong M. C. and Busch-Vishiniac I. J., 'A submicron accuracy magnetic levitation micromachine with endpoint friction,' Sensors and Actuators, Vol. 29, pp. 225-234, 1991 https://doi.org/10.1016/0924-4247(91)80019-L
- Xu, W. and King, T., 'Flexure hinges for piezoactuator displacement amplifiers : flexibility, accuracy, and stress considerations,' Precision engineering, Vol. 19, No.1, pp. 4-10, 1996 https://doi.org/10.1016/0141-6359(95)00056-9
- Awabdy, B. A., Shin, W. and Auslander D. M., 'Nanometer positioning of a linear motion stage under static loads,' IEEE/ASME Trans. on Mechatronics, Vol. 3, No.2, pp. 113-119, 1998 https://doi.org/10.1109/3516.686679
- Tadokoro S., Murakami T., Fuji S., Kanno R. and Oguro K., 'An elliptic friction drive element using an ICPF actuator,' IEEE Control Systems Magazine, Vol. 17, No.3, pp. 60-68,1997 https://doi.org/10.1109/37.588149
- Tomita, Y. and Koyanagawa, Y., 'Study on a surfacemotor driven precise positioning system,' Journal of Dynamic systems, Measurement, and Control, Vol. 117, pp. 311-319,1995 https://doi.org/10.1115/1.2799121
- Jung, K. S. and Baek, Y. S., 'Study on a novel contact-free planar moving system using electromagnet and permanent magnet,' IEEE/ASME Trans. on Mechatronics, Vol. 7, No.2, pp. 35-43, 2002 https://doi.org/10.1109/3516.990885
- Jung, K. S. and Baek, Y. S., 'Contact-free electromagnetic planar motion system for high precision manipulating in super clean environments,' Proc. of the 32nd ISR (International Symposium on Robotics), Korea, April, pp. 1099-1104, 2001
- 정광석, 백윤수, '비접촉 평면 구동기의 자기력 조합 방식 구동 원리,' 한국정밀공학회지, 제 18권 제 3호, pp. 115-121,2001
- Jung, K. S. and Baek, Y. S., 'Precision stage using a non-contact planar actuator based on magnetic suspension technology,' Mechatronics (to be published) https://doi.org/10.1016/S0957-4158(03)00011-4
- 정광석, 이상헌, 백윤수, '자기 흡인식 부상 원리에 기초한 비접촉식 서피스 액추에이터의 초정밀 범용 스테이지에의 적용 가능성,' 대한기계학회 논문집 A 권, 제 26 권, 제 3 호, pp. 452-460, 2002 https://doi.org/10.3795/KSME-A.2002.26.3.452