Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Trends of Soft Lithography Technology

소프트 리소그래피 기술 동향

  • 신영재 (한국기계연구원 지능형정밀기계연구부) ;
  • 조정대 (한국기계연구원 첨단산업기술연구부) ;
  • 이응숙 (한국기계연구원 지능형정밀기계연구부)
  • Published : 2003.04.01
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References

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