마이크로-나노 매니퓰레이션 기술의 동향

  • 김경환 (우신기전㈜) ;
  • 김덕호 (한국과학기술연구원 마이크로시스템 연구센터)
  • Published : 2003.03.01

Abstract

Keywords

References

  1. IEEE International Conference on Robotics and Automation Hand-Eye System in Nano Manipulation World T.Sato;T.Kameya;H.Miyazaki;Y.Hatamura
  2. IEEE International Workshop on Robot and Human Communication Human Machine Interaction for Manipulations in the Microworld A.Codourey;M.Rodriguez;I.Pappas
  3. IEEE Trans. On Robotics and Automation v.15 no.1 Development of a Micro Manipulation System Having a Two Fingered Micro-Hand T.Tanikawa;T.Arai
  4. IEEE/ASME Trans. on Mechatronics v.5 Controlled pushing of nanoparticles: modeling and experiments M.Sitti;Hashimoto
  5. International Workshop on Micro Factory Hybrid Microassembly System for Three-Dimensional MEMS Components K.Kim;D.H.Kim