Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 16 Issue 1
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- Pages.63.2-63
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- 2003
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Control of temperature coefficient of frequency in zinc oxide thin Film bulk acoustic wave resonators at various frequency ranges
- Yoshino, Y. (R&D Division, Murata Mfg. Co., Ltd.) ;
- Takeuchi, M. (R&D Division, Murata Mfg. Co., Ltd.) ;
- Inoue, K. (R&D Division, Murata Mfg. Co., Ltd.) ;
- Makino, T. (R&D Division, Murata Mfg. Co., Ltd.) ;
- Arai, S. (R&D Division, Murata Mfg. Co., Ltd.) ;
- Hata, T. (Department of Electrical and Electronic Engineering, Kanazawa University)
- Published : 2003.01.01
Abstract
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