Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Robust Motion Controller Design for Flexible XY Positioning Systems

유연한 XY 위치결정 시스템을 위한 강인 동작 제어기 설계

  • 김봉근 (University of California at Berkeley, 기계공학과) ;
  • 박상덕 ((재)포항산업과학연구원 기전연구팀) ;
  • 정완균 (포항공과대학교 기계공학과) ;
  • 염영일 (포항공과대학교 기계공학과)
  • Published : 2003.01.01
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Abstract

A robust motion control method is proposed fur the point-to-point position control of a XY positioning system which consists of a base cart, elastic ben and moving mass. The horizontal motion controller consists of the feedforward controller to suppress the single mode vibration of the elastic beam and the feedback controller to get the high-accuracy positioning performance of the base cart. Input preshaping vibration suppression method based on system modeling with analytic frequency equation is proposed and integrated into the robust internal-loop compensator(RIC) to increase the robustness of the whole closed-loop system The vertical motion controller is proposed based on the dual RIC structure. Through experiments, it is shown that the proposed method can stabilize the system and suppress the vibration in the presence of uncertainties and disturbances.

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References

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