Transactions on Electrical and Electronic Materials

  • 제4권4호
  • /
  • Pages.10-12
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  • 2003
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Development of NBCO Coated Conductor by using Superconductor Technology

  • Lee Sang-Heon (Department of Electronics Information and Communication Engineering, Sun Moon University)
  • 발행 : 2003.08.01
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초록

NBCO thin films have been fabricated by magnetron sputtering technique on heated $SrTiO_3$ substrates. The oxidation and crystallization of the films were strongly dependent on the distance between the targets and the substrate, as well as on the oxygen partial pressure. The critical temperatures were above 80K for the films prepared under the condition of a small target to substrate gap, in spite of a very low oxygen pressure of 0.2Pa. The results suggest the importance of the activated oxygen uptake into the films during sputtering.

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참고문헌

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