Transactions on Electrical and Electronic Materials

  • 제4권4호
  • /
  • Pages.1-6
  • /
  • 2003
  • /
  • 1229-7607(pISSN)
  • /
  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지
DOI QR코드

DOI QR Code

Al2O3 Coating and Filling of Carbon Nanotubes

  • Lee Jong-Soo (Department of Electrical Engineering, College of Engineering, Korea University) ;
  • Min Byung-Don (Department of Electrical Engineering, College of Engineering, Korea University) ;
  • Kim Sang-Sig (Department of Electrical Engineering, College of Engineering, Korea University)
  • 발행 : 2003.08.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Aluminum oxide ($Al_2O_3$) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). $Al_2O_3$ material was deposited on the MWNTs at a substrate temperature of $300^{\circ}C$ using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous $Al_2O_3$ material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.

키워드

참고문헌

  1. S. Iijima, 'Helical microtubules of graphitic carbonNature, Vol. 354, P. 56, 1991 https://doi.org/10.1038/354056a0
  2. H.-Q. Wu, X.-W. Wei, M.-W. Shao, J.-S. Gu, and M.-Z. Qu, ' Synthesis of coffer oxide nano-particles using carbon nanotubes as templates',Chem. Phys. Lett., Vol. 364, p. 152, 2002
  3. C. Tang, S. Fan, M. L. Chapelle, H. Dang, and P. Li,'Synthesis of gallium phosphide nanorods', Adv.Mater., Vol. 12, No. 18, P.1346, 2000 https://doi.org/10.1002/1521-4095(200009)12:18<1346::AID-ADMA1346>3.0.CO;2-8
  4. B. C. Satishkumar, A. Govindaraj, E. M. Vogl, L.Basumallick, and C. N. R. Rao, 'Oxide nanotubes prepared using carbon nanotubes as templates', J.Mater. Res., Vol. 12, No. 3, p. 604, 1997 https://doi.org/10.1557/JMR.1997.0089
  5. Y. Zhang, J. Liu, R. He, Q. Zhang, X. Zhang, and J. Zhu, 'Synthesis of alumina nanotubes using carbon nanotubes as templates', Chem. Phys. Lett., Vol. 360,p.579,2002
  6. S. S. Berdonosov, S. B. Baronov, Y. V. Kuzmicheva D. G. Berdonosova, and V. Melikhov, 'Hollow alumina macrotubes', Inorg. Mater., Vol. 37, No.10, p. 1037,2001 https://doi.org/10.1023/A:1012331227393
  7. L. Pu, X. M. Bao, J. P. Zou, and D. Feng,'Individual alumina nanotubes', Angew. Chem. Int. Ed., Vol. 40, No. 8, p. 1490, 2001 https://doi.org/10.1002/1521-3773(20010417)40:8<1490::AID-ANIE1490>3.0.CO;2-K
  8. S. M. George, A. W. Ott, and J. W. Klaus, 'Surface chemistry for atomic layer growth', J. Phys. Chem.,Vol. 100, No. 31, p. 13121, 1996 https://doi.org/10.1021/jp9536763
  9. Y. T. Lee, J. Park, Y. S. Choi, H. Ryu, and H. J. Lee 'Temperature-dependent growth of vertically aligned carbon nanotubes in the range 800-1100 $^oC$', J. Phys. Chem., Vol. B106, No. 31, p. 7614,2002
  10. C. J. Lee, K. H. Son, J. Park, J. E. Yoo, Y. Huh, and J. Y. Lee, 'Low temperature growth of vertically aligned carbon nanotubes by thermal chemical vapor deposition', Chem. Phys. Lett., Vol. 338, No.2-3, P. 113,2001 https://doi.org/10.1016/S0009-2614(00)01378-6
  11. W. I. Milne, K. B. K. Teo, M. Chhowalla, G. A. J.Amaratunga, D. Pribat, P. Legagneux, V. T. Binh, and V. Semet, 'Electron emission from arrays of carbon nanotubes/fibres', Current Appl. Phys., Vol.2, No. 6, p. 509,2002 https://doi.org/10.1016/S1567-1739(02)00166-9
  12. J. W. Elam, Z. A. Sechrist, and S. M.George, 'ZnO/$Al_2O_3$ nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements', Thin Solid Films, Vol. 414, No. 1,p.43,2002 https://doi.org/10.1016/S0040-6090(02)00427-3
  13. H. K.umagai, M. Matsumoto, K. Toyoda, M. Obara, and M. Suzuki, 'Fabrication of titanium oxide thin films by controlled growth with sequential surface chemical reactions', Thin Solid Films, Vol. 263, No1,p-47, 1995 https://doi.org/10.1016/0040-6090(95)06555-5
  14. P. M. Ajayan, T. W. Ebbesen, I.Ichihashi, S. lijima, K. Tanigaki, and H. Hiura, 'Opening carbon nanotubes with oxygen and implications for filling',Nature, Vol. 362, p. 522, 1993
  15. R. Pati, Y. Zhang, and S. K. Nayak, 'Effect of $H_2O$adsorption on electron transport in a carbon nanotube', Appl. Phys. Lett., Vol. 81, No. 14, p.2638,2002
  16. T. Seeger, Th. Kohler, Th. Frauenheim, N. Grobert, M. Ruhle, M. Terrones, and G. Seifert, 'Nanotube composites: novel Si$O_2$ coated carbon nanotube',Chem. Commun., Vol. 34-35, p. 34, 2002
  17. B. C. Satishkumar, A. Govindaraj, M. Nath, and C.N. R. Rao, 'Synthesis of metal oxide nanorods using carbon nanotubes as templates', J Mater.Chem., Vol. 10, p. 2115, 2000 https://doi.org/10.1039/b002868l
  18. P. M. Ajayan and S. lijima, 'Capillarity induced filling of carbon nanotubes', Nature, Vol. 361, p.333,1993 https://doi.org/10.1038/361333a0
  19. G. V. Samsonov, The oxide handbook, IFI Plenum Data Company, New York, P. 173, 1982