Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of Nozzle Scanning in Micro Grooving of Glass by Powder Blasting

Powder Blasting 에 의한 유리의 미세 홈 가공시 노즐 주사횟수의 영향

  • 김광현 (인천대학교 대학원 기계공학과) ;
  • 최종순 (인천대학교 대학원 기계공학과) ;
  • 박동삼 (인천대학교 기계공학과)
  • Published : 2002.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than $100{\mu}$ m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film. Therefore, well-controlled masking process is the most important factor for micro machining of glass with accuracy.

Keywords

References

  1. Slikkerveer, P. J., Bouten P.C.P., Veld F.H. and Scholten H., 1998, 'Erosion and Damage by Sharp Particles,' Wear, 217, pp. 237-250 https://doi.org/10.1016/S0043-1648(98)00187-2
  2. Verma, A.P. and Lal, G.K., 1996, 'A Theoretical Study of Erosion Phenomenon in Abrasive Jet Machining,' Transactions of the ASME, Vol. 118, pp. 564-570 https://doi.org/10.1115/1.2831575
  3. Sheldon, G.L., 1970, 'Similarities and Differences in the Erosion Behavior of Materials,' Trans. of the ASME. Journal of Basic Engineering, pp. 619-626
  4. Tsunemoto KURIYAGAWA, Norio YOSHIDA and Katsuo SYOJI, 1998, 'Machining Characteristics of Abrasive Jet Machining', Journal of JSPE, Vol. 54, No. 6, pp. 881-885
  5. Koichi TITAJIMA, Masataka NONAKA and Moriyasu IZAWA, 2000, 'Basic Study on the Dry Abrasive Machining (The 2nd Report),' Proceedings of the JSPE Spring Annual Meeting. p. 238
  6. Slikkerveer, P.J., Bouten, P.C.P. and de Haas, F.C.M., 2000, 'High Quality Mechanical Etching of Brittle Materials by Powder Blasting,' Sensors and Actuators 85, pp. 296-303 https://doi.org/10.1016/S0924-4247(00)00343-5
  7. Henk, Wensink, Berenshot, U.W., Henri, V. Jan seu, Miko C. Elwenspoek, 2000, 'High Resolution Powder Blast Micromaching,' Proceedings of the IEEE Micro Electro Mechanical Sustenus (MEMS) 2000, pp. 769-774 https://doi.org/10.1109/MEMSYS.2000.838615
  8. Ligthart, H.J., Slikkerveer, P.J., Verd, F.H. In't and Swinkels, P.H.W., Zonneveld M.H., 1996, 'Glass and Glass Machining in Zeus Panels,' Philips J. Res., Vol. 50, No. 3/4, pp. 475-499 https://doi.org/10.1016/S0165-5817(97)84687-6
  9. Arvi, Kruusing, Seppo, Leppavuori, Abtti, Uusimaki, Matti, Uusimaki., 1999, 'Rapid Pototyping of Silicon Structures by Aid of Laser and Abrasive-Jet Machining,' Part of the Symposium on Design. Test, and Microfabrication of MEMS and MOEMS, Paris, France, SPIE, Vol. 3680, pp. 870-878 https://doi.org/10.1117/12.341285
  10. Moriyasu IZAWA, 2000, 'The Trend and Application of the Abrasive Jet Machining,' Journal of the Society of Grinding Engineers, Vol. 44, No. 1, pp. 11-14
  11. Solignac, D., Sayah, A., Constantin, S., Freitag ,R., Gijs, M.A.M., 2001, 'Powder Blasting for the Realisation of Microchips for Bio-Analytic Applications,' Sensor and Actuators A 3003, pp. 1-6 https://doi.org/10.1016/S0924-4247(01)00577-5
  12. Henk, Wensink, Henri, V Jansen, J. W, B, erenschot, Miko C. Elwenspo, 2000, 'Mask Materials for Powder Blasting,' J. Micromech. Microeng., 10, pp. 175-180 https://doi.org/10.1088/0960-1317/10/2/313
  13. Choi, J.S., Park, K.H. and Park, D.S., 2000, 'Micro Groove Cutting of Glass Using Abrasive Jet Machining,' Proceedings of the KSPE Fall Annual Meeting, pp. 963-966
  14. Park, K.H., Kim, K.H., Choi, J.S. and Park, D.S., 2001, 'Effect of the Number of Nozzle Scanning in Micro-Line Grooving of Glass by Powder Blasting,' Proceedings of the KSMTE Spring Annual Meeting, pp. 294-299
  15. Marshall, D.B., Lawn, B.R., Evans, A.G., 1982, 'Elastic/plastic Indentation Damage in Ceramics: the Lateral Crack System,' J. Am. Ceram. Soc. 65 (11), pp. 561-566 https://doi.org/10.1111/j.1151-2916.1982.tb10782.x

Cited by

  1. Fabrication of Glass Microstructure Using Laser-Induced Backside Wet Etching vol.38, pp.9, 2014, https://doi.org/10.3795/KSME-A.2014.38.9.967