한국재료학회지 (Korean Journal of Materials Research)

  • 제12권11호
  • /
  • Pages.856-859
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  • 2002
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  • 1225-0562(pISSN)
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  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
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열처리가 알루미나 나노기공의 배열에 미치는 영향

Effects of Heat Treatments of Aluminum Substrate on Nanopore Arrays in Anodic Alumina

  • 조수행 (국민대학교 신소재공학부) ;
  • 오한준 (한서대학교 재료공학과) ;
  • 김성수 (삼영전자공업(주)) ;
  • 주은균 (국민대학교 신소재공학부) ;
  • 유창우 (국민대학교 신소재공학부) ;
  • 지충수 (국민대학교 신소재공학부)
  • Cho, S.H. (School of Advanced Materials Engineering, Kookmin University) ;
  • Oh, H.J. (Dept. of Materials Engineering, Hanseo University) ;
  • Kim, S.S. (Samyoung Electronics Co., Ltd.) ;
  • Joo, E.K. (School of Advanced Materials Engineering, Kookmin University) ;
  • Yoo, C.W. (School of Advanced Materials Engineering, Kookmin University) ;
  • Chi, C.S. (School of Advanced Materials Engineering, Kookmin University)
  • 발행 : 2002.11.01
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초록

To investigate effects of heat treatments including grain size control in substrate aluminum on nanopore arrays in anodic alumina template, aluminum was heat treated at $500^{\circ}C$ for 1h. The heat treated aluminum was anodized by two successive anodization processes in oxalic solution and the nanopore arrays in anodic alumina layer were studied using TEM and FE-SEM. The highly ordered porous alumina templates with 110 nm interpore distance and 40 nm pore diameter have been observed and the pore array of the anodic alumina has a uniform and closely-packed honeycomb structure. In the case of alumina template obtained from heat treated aluminum substrate, the well- ordered nanopore region in anodic alumina increased and became more homogeneous compared with that from non-heattreated one.

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