MEMS기술을 이용한 RF 수동소자 기술

  • Published : 2002.12.01

Abstract

Keywords

References

  1. T. M. Weller, L. P. B. Katehi, and G. M. Rebeiz, 'High Performance Microshield Line Components,' IEEE Trans., Microwave Theory and Tech.. vol. 43, pp. 534-543, March 1995 https://doi.org/10.1109/22.372098
  2. T. M. Weller and L. P. Katehi 'Miniature Stub and Filter Designs Using The Microshield Transmission Line,' IEEE MTT-S, vol. 2, pp. 675-678, 1995
  3. S.J. Yoon, S.H. Jeong, J.G. Yook. Y.J. Kim, S.G. Lee, O.K. Seo, K.S. Lim, and D.S. Kim, 'A novel CPW structure for high speed interconnects,' IEEE MTT-S. vol. 2, pp. 771-774, 2001
  4. G. E. Ponchak and A. N. Downey, 'Characterization of Thin Film Microstrip Lines on Polyimide,' IEEE Trans., on Components, Hybrids, and Manufacturing Tech.., vol. 21, pp. 171-176, May 1998
  5. V. B. Krishnamurthy, H. S. Cole, and T. Sitnik Nieters, 'Use of BCB in high frequency MCM interconnects.' IEEE Trans. Comp., Packag., Manufact Technol., vol. 19, pp. 42-47, Feb. 1996 https://doi.org/10.1109/96.486483
  6. T. Hiraoka, T. Tokumitsu, and M. Aikawa, 'Very small wide band MMIC magic T's using microstrip lines on a thin dielectric film,' IEEE Trans. Microwave Theory and Tech., vol. 37, pp. 1569-1575, Oct. 1989 https://doi.org/10.1109/22.41003
  7. C. Patrick Yue and S. Simon Wong, 'On Chip Spiral Inductors with Patterned Ground Shields for Si Based RF IC's.' IEEE J. Solid State Circuits, vol 35, pp. 780-787, May 1998 https://doi.org/10.1109/4.841507
  8. Jose M. Lopez villegas. J. Samitier, C. Cane, P. Losantos, and J. B, 'Improvement of the Quality Factor of RF Integrated Inductors by Layout Optimization.' IEEE Trans. Microwave Theory and Tech.., vol. 48, pp. 76-83, Jan. 2000 https://doi.org/10.1109/22.817474
  9. Yorgos K. Koutsoyannopoulos and Yannis Papananos, 'Systematic Analysis and Modeling of Integrated Inductors and Transformers in RF IC Design.' IEEE Transactions on Circuit and Systems, vol. 47, pp. 699-713, Aug. 2000 https://doi.org/10.1109/82.861403
  10. 정성헌, 이상노. 육종관. 박한규, 'High-Q MEMS Inductor의 최적화 설계,' 2001년도 추계 마이크로파 및 전파 학술대회, pp. 227-230, 2001
  11. J.D. Larson III, P.D. Bradley, S. Wartenberg. and R.C. Ruby, 'Modified Butterworth Van Dyke circuit for FBAR resonators and automated measurement system,' 2000 IEEE Ultrasonics Symposium Digest, vol. 1, pp. 863-68, 2000
  12. P.D. Bradley, R.C. Ruby, J.D. Larson III, Y. Oshmyansky and D. Figueredo, 'A Film Bulk Acoustic Resonator (FBAR) Duplexers for USPCS Handset Applications,' 2001 IEEE MTT-S Digest, vol. 1, pp. 367-70, 2001
  13. Q. X. Su, P. Kirby, E. Komuro, A. Imura, Q. Zhang, and R. Whatmore, Thin film bulk acoustic resonators and filters using ZnO and Lead Zirconium Titanate thin films,' IEEE Trans. Microwave Theory and Techniques, vol. 49, no. 4, pp. 769-78. April 2001 https://doi.org/10.1109/22.915462
  14. K. W. Kim, J. G. Yook, M. G. Gu, W. Y. Song, Y. J. Yoon and H. K. Park, 'TFBAR Filters for 2 GHz Wireless Applications,' IEEE MTT-S Dig., vol. 2, pp 1181-1184, 2002
  15. K. W. Kim, J. G. Yook, and H. K. Park, 'CAD model analysis of the air gap type TFBAR,' Microwave and Optical Technology Letters, vol. 34. no. 5, pp. 384-385, Sep. 2002 https://doi.org/10.1002/mop.10469
  16. K. W. Kim, G. Y. Kim, J. G. Yook, and H. K. Park, 'Air gap type TFBAR based filter topologies,' Microwave and Optical Technology betters, vol. 34. no. 5, pp. 386-387, Sep. 2002 https://doi.org/10.1002/mop.10470