Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization and Standardization of Piezoelectric Thin Films

압전박막의 특성평가 및 표준화

  • Published : 2002.12.01
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Abstract

A great deal of research has been done in the field of characterization for piezoelectric thin films after the first report on the measurement for the piezoelectric coefficient of thin films in 1990. The main idea of this research is to provide a distinctive solution for the measurement and standardization of both the longitudinal and the transverse piezoelectric d-coefficients, d33 and d31, of ferroelectric thin films. In general, to get these two coefficients of thin films, two different measuring systems are required. Here, we propose the improved method for the evaluation of these two coefficients with single equipment and with the relatively convenient procedure. The two-step loading process of applying the both positive and the negative pressure has been introduced to acquire the piezoelectric coefficients. These results have been calibrated for both the longitudinal and 4he transverse piezoelectric d-coefficients, d33 and 431, of thin films by comparison with the virtual standard created from FEM. In this experiments, we have obtained d33 of 331pC/N and 031 of -92.2pC/N for the PZT thin films.

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References

  1. MRS Symp. Proc. v.200 Substrate effects in in-situ growth of perovskites by PLD K. F. Etzold
  2. J. Appl. Phys. v.76 Measurement of piezoelectric co-efficients of feroelectric thin films K.Lefki https://doi.org/10.1063/1.357693
  3. Proc. of the 9th IEEE MEMS workshop Two dimensional silicon micro-machined optical scanner integrated with photo detector and piezoresistor M. Sakata
  4. MRS Symp. Proc. v.541 Stress and stress relaxation study of sputtered PZT thin films for microsystems applications E. Defay
  5. J. Appl. Phys. v.75 Piezoelectric properties of sol-gel derived ferroelectric and antiferroelectric thin layers Jie-Fang Li https://doi.org/10.1063/1.355872
  6. Rev. Sci. Instrum. v.67 Interferometric measurements of electric field-induced displacements in piezoelectric thin films A. L. Kholkin https://doi.org/10.1063/1.1147000
  7. J. Vac. Sci. Technol. v.B14 Scanning force microscopy for the study of domain structure in ferroelectric thin film A. Gruverman
  8. J. Appl. Phys. v.81 Characterization of ferroelectric lead zirconate titanate films by scanning force microscopy G. Zavala https://doi.org/10.1063/1.365350
  9. The 11th ISAF A new characterization of piezoelectric thin films D. G. Kim
  10. Integrated Ferroelectrics v.24 Piezoelectric properties of lead zirocnate titanate thin films characterzied by the pneumatic loading method D. G. Kim https://doi.org/10.1080/10584589908215583
  11. 전기전자재료학회 하계학술대회 논문집 압전박막의 특성평가 김동국
  12. 전기전자재료학회논문지 v.13 no.11 Screen Printing법을 이용한 PMN-PZT 후막의 제조 및 특성연구 김상종