마이크로시스템 기술의 소개

References

1. Proc. IEEE v.86 no.8 A MEMS-based projection display(Invited Paper) P. F. van Kessel;L. J. Hornbeck, R. E. Meier;M. R. Douglass
2. Optical Eng. v.33 no.11 Micro-opto-electro-mechanical systems M. E. Motamedi
3. J. Micromech. Microeng. v.10 no.4 RF MEMS from a device perspective(Topical Review) J. Jason Yao
4. Proc. IEEE v.86 no.8 Microfabricated devices for genetic diagnostics(Invited Paper) C. H. Mastrangelo;M. A. Burns;D. T. Burke