Journal of Korean Vacuum Science & Technology

한국진공학회 (The Korean Vacuum Society)
권호 표지

Formation of Ti-0 Biomedical Film on Ti6A14V Alloy by DC Glow Plasma Oxidizing

  • Zheng, C.L. (Department of Materials Science and Engineering, Tsinghua University) ;
  • Cui, F.Z. (Department of Materials Science and Engineering, Tsinghua University) ;
  • Xu, Z. (Surface Engineering Research Institute, Taiyuan University of Technology)
  • 발행 : 2002.06.01
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초록

Ti-0 film is a kind of biocompatible surface materials. In this paper, a new method, glow discharge plasma oxidizing, has been used in synthesizing Ti-O gradient films on Ti6A14V substrates. The effects of ion bombardment and process parameters on the structures of titanium oxide layers have been investigated. The results demonstrate that DC glow plasma oxidizing is more efficient in preparation of dense, hard, and high adhesive Ti-O biomedical films on titanium and its alloys. Samples treated by this method show higher hardness values than by others. Especially, in the condition of hollow cathode discharge, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of titanium.

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