Fibers and Polymers

The Korean Fiber Society (한국섬유공학회)
권호 표지

Flow Behavior at the Embossing Stage of Nanoimprint Lithography

  • Jeong, Jun-Ho (Department of Inteligent Precision Machine, Korea Institute of Machinery and Materials) ;
  • Park, Youn-Suk (KyungWon Tech Corporation) ;
  • Shin, Young-Jae (Department of Inteligent Precision Machine, Korea Institute of Machinery and Materials) ;
  • Lee, Jae-Jong (Department of Inteligent Precision Machine, Korea Institute of Machinery and Materials) ;
  • Park, Kyoung-Taik (Department of Inteligent Precision Machine, Korea Institute of Machinery and Materials)
  • Published : 2002.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

Nanoimprint lithography (NIL) is a nanofabrication method known to be a low cost method of fabricating nanoscale patterns as small as 6 m. This study is focused on understanding physical phenomena in the embossing of nano/micro scale structures with 100 nm minimum feature size. We present the effects of capillary force and width of stamp groove on flow behavior at the embossing stage through numerical experimentation. We also compare our numerical results with previous experimental results and discuss our results.

Keywords

References

  1. S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B, 15, 2897 (1997) https://doi.org/10.1116/1.589752
  2. L. J. Heydermann, H. Schift, C. David, J. Gobrecht, and T. Schweizer, Microelectronic Engineering, 54, 229 (2000) https://doi.org/10.1016/S0167-9317(00)00414-7
  3. H. C. Sheer and H. Schulz, Microelectronic Engineering, 56, 311(2001) https://doi.org/10.1016/S0167-9317(01)00569-X
  4. X. J. Shen, L. W. Pan, and L. Lin, Sensors and Actuators A, 97-98, 428 (2002) https://doi.org/10.1016/S0924-4247(02)00029-8
  5. A. Beskok, W. Trimmer, and G. E. Karniadakis, J. Fluid Eng., 118, 448 (1996) https://doi.org/10.1115/1.2817779
  6. D. Y. C. Chan and R. G. Horn, J. Chem. Phys., 83, 5311(1985) https://doi.org/10.1063/1.449693
  7. C. Jackson, Y. J.Chen, and J. W. Mays, J. Appl. Polym. Sci., 61, 865 (1996) https://doi.org/10.1002/(SICI)1097-4628(19960801)61:5<865::AID-APP20>3.0.CO;2-V
  8. S. Parakar, 'Numerical heat transfer and fluid flow', Heisphere Publishing Corp., McGraw Hill, New York, 1980
  9. C. Hirt and B. Nichols,J. Comp. Phy., 39, 201 (1981) https://doi.org/10.1016/0021-9991(81)90145-5
  10. D. B. Koth and R. C. Mjolsness, AIAA Journal, 30, 2694(1992) https://doi.org/10.2514/3.11286
  11. Z. Tadmor and C. Gogos, 'Principles of polymer Processing', Wiley, New York, 1970
  12. E. Schaffer, Ph. D. Thesis, University of Groningen, Groningen,2001