A Study on Ultra Precision Machining for Aspherical Surface of Optical Parts

비구면 광학부품의 초정밀 가공에 관한 연구

  • Lee, Ju-Sang (School of Automotive and Mechanical Engineering, Nambu University) ;
  • 이주상 (남부대학교 자동차기계공학부) ;
  • 장사극웅 (일본 동북대학 대학원 공학연구과)
  • Published : 2002.10.01

Abstract

This paper deals with the precision grinding for aspherical surface of optical parts. A parallel grinding method using the spherical wheel was suggested as a new grinding method. In this method, the wheel axis is positioned at a $\pi$/4 from the Z-axis in the direction of the X-axis. An advantage of this grinding method is that the wheel used in grinding achieves its maximum area, reducing wheel wear and improving the accuracy of the ground mirror surface. In addition, a truing by the CG (curve generating) method was proposed. After truing, the shape of spherical wheel transcribed on the carbon is measured by the Form-Talysurf-120L. The error of the form in the spherical wheel which is the value ${\Delta}x$ and $R{^2}{_y}$ inferred from the measured profile data is compensated by the re-truing. Finally, in the aspherical grinding experiment, the WC of the molding die was examined by the parallel grinding method using the resin bonded diamond wheel with a grain size of #3000. A form accuracy of 0.16${\mu}m$ P-V and a surface roughness of 0.0067${\mu}m$ Ra have been resulted.

Keywords

References

  1. 極微粒ダイヤモンドホイ一ルを用いた超精密鏡面硏削に關する硏究協力分料會 報告書, 超精密鏡面硏削に關する硏究, 日本精密工學會 産學協同硏究協議會, 日本, pp. 1-9, 1995
  2. H.Suzuki, S.Hara and H.Matsunaga, 'Study on Aspherical Surface Polishing Using a Small Rotating Tool,' Journal of the Japan Society for Precision Engineering, Vol. 59, No. 10, pp. 1713-1718, 1993 https://doi.org/10.2493/jjspe.59.1713
  3. S.Itoh, 'Study on Measurement of Axi-Symmetrical Form Generated by Ultra-Precision Machining(3rd Report),' Journal of the Japan Society for Precision Engineering, Vol. 61, No. 3, pp. 391-395, 1995 https://doi.org/10.2493/jjspe.61.391
  4. 김부태, 'Aspheric Lens 금형개발,' 한국정밀공학회 춘계학술대회논문집, pp. 43-47, 1992
  5. H.Suzuki,S.Kodera, T.Nakasuji, T.Ohta and K.Syoji, 'Study on Aspherical Surface Polishing of Single Crystal Silicon Lens,' Journal of the Japan Society for Precision Engineering, Vol. 63, No. 9, pp. 128-1284, 1997
  6. H.Suzuki, S.Kodera, S.Maekawa, N.Morita, E.Sakurai, K.Tanaka, H.Takeda, T.Kuriyagawa and K.Syoji, 'Study on Precision Grinding of Micro Aspherical Surface,' Journal of the Japan Society for Precision Engineering, Vol. 64, No. 4, pp. 619-623, 1998 https://doi.org/10.2493/jjspe.64.619
  7. H.Suzuki, T.Kitajima and S.Okuyama, 'Study on Precision cutting of Axi-Symmetric Aspherical Surface,' Journal of the Japan Society for Precision Engineering, Vol. 65, No. 3, pp. 401-405, 1999 https://doi.org/10.2493/jjspe.65.401
  8. H.Suzuki, O.Horiuchi, M.Nishioka, H.Takeda, K.Tanaka, T.Kitajima, S.Okuyama and K.Takeuchi, 'Precision Grinding of Micro Aspherical Surface,' Advances in Abrasive TechnologyIII, The Society of Grinding Engineering, Japan, pp. 573-578, 2000
  9. T.Kuriyagawa, J.S.Lee, M.Saeki and K.Syoji, 'Micro Truing/Dressing for Small-Sized Aspherical Mirror Grinding,' Advances in Abrasive TechnologyIV, The Korean Association of Machining Engineering, Korea, pp. 111-114, 2001
  10. 이주상, 佐伯優, 廚川常元, 庄司克雄, '소형 비구면 렌즈 금형의 경면 연삭가공에 관한 연구,' 한국정밀공학회지, 제18권, 제12호, pp. 82-87, 2001
  11. 酒井英行, 實驗精度と誤差, 丸善出版社, 日本, pp. 71-79, 2000