Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Fabrication of Micro-fluidic Channels using a Flexible and Rapid Surface Micro-machining Technique

유연하고 신속한 표면미세가공기술을 이용한 Micro-fluidic Channel 제작

  • 김진산 (연세대학교 대학원 기계공학과) ;
  • 성인하 (연세대학교 대학원 기계공학과) ;
  • 김대은 (연세대학교 기계공학부)
  • Published : 2002.08.01
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Abstract

Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

Keywords

References

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