The Transactions of the Korean Institute of Electrical Engineers D (대한전기학회논문지:시스템및제어부문D)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Fabrication and Characterization of Multi-Channel Electrode Array (MEA)

다중 채널 전극의 제작 및 특성 평가

  • 성락선 (태웅실업 기술연구소) ;
  • 권광민 (고려대학 공과대학) ;
  • 박정호 (고려대학 공과대학 전기공학과)
  • Published : 2002.09.01
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Abstract

The fabrication and experimentation of multi-channel electrodes which enable detecting and recording of multi-site neuronal signals have been investigated. A multi-channel electrode array was fabricated by depositing 2000${\AA}$ thick Au layer on the 1000${\AA}$ thick Ti adhesion layer on a glass wafer. The metal paths were patterned by wet etching and passivated by depositing a PECVD silicon nitride insulation layer to prevent signals from intermixing or cross-talking. After placing a thin slice of rat cerebellar granule cell in the culture ring located in central portion of the multi-channel electrode plate, a neuronal signal from an electrode which is in contact with the cerebellar granule cell has been detected. It was found that the electrode impedance ranges 200㏀∼1㏁ and the impedance is not changed by cleaning with nitric acid. Also, the impedance is inversely proportion to the exposed electrode area and the cross-talk is negligible when the electrode spacing is bigger than 600$\mu\textrm{m}$. The amplitude and frequency of the measured action potential were 38㎷ and 2㎑, which are typical values. From the experimental results, the fabricated multi-channel electrode array proved to be suitable for multi-site neuronal signal detection for the analysis of a complicated cell network.

Keywords

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