Journal of Power Electronics

The Korean Institute of Power Electronics (전력전자학회)
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Voltage Source Resonant Inverter for Excimer Gas Discharge Load

  • Koudriavtsev, Oleg (The Graduate School of Eng. and Science, Power Electronic Systems and Control Eng Lab., Yamaguchi University) ;
  • Nakaoka, Mutsuo (The Graduate School of Eng. and Science, Power Electronic Systems and Control Eng Lab., Yamaguchi University)
  • Published : 2002.07.01
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Abstract

Silent gas discharge method has been widely applied fur ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low - cost power supply for such systems is an important task at present. This paper introduces high-frequency inverter type mode power supply designed fur ozone generation tube and ultraviolet generation excimer lamp and considerations on the design of the inverter and pulse density modulation control strategy applied in it.

Keywords

References

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