Journal of electromagnetic engineering and science

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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Air-Gap Type TFBAR Ladder Filters for Wireless Applications

  • Kim, Kun-Wook (Department of Electrical and Electronic Engineering, Yonsei University) ;
  • Goo, Myeong-Gweon (MEMS solutions Inc.) ;
  • Yook, Jong-Gwan (Department of Electrical and Electronic Engineering, Yonsei University) ;
  • Park, Han-Kyu (Department of Electrical and Electronic Engineering, Yonsei University)
  • Published : 2002.05.01
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Abstract

TFBAR filters for wireless applications are simulated and fabricated. A CAD model is used to analize the air-gap type single resonator and MBVD model is used far filter design. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verier the CAD model, simulated and measured results are compared far various top electrode thicknesses, and the agreement is within 0.5 % for the parallel resonance frequency. Various types of the ladder type band pass filters are predicted and their responses are compared with measured frequency data.

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References

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