References
- J. Electrochem. Soc. v.138 Design and verification of nearly ideal flow and heat transfer in a rotating disk chemical vapor deposition reactor Breiland W.G.;Evans G.H.
- J.of Crystal Growth v.132 Numerical modeling of particle dynamics in a rotating disk chemical vapor deposition reactor Davis R.W.;Moore E.F.;Zachariah M.R.
- ASME/JSME Thermal Engineering Conference v.2 Numerical computation of the particle deposition onto the rotating and heated circular plate Hirano H.;Ozoe H.
- Thin Solid Films v.365 Computational modeling of transport phenomena and detailed chemistry in chemical vapor deposition-a benchmark solution Kleijin C.R.
- Transactions of the Korean Society of Mechanical Engineers, B v.22 Particle deposition on a rotating disk in application to vapor deposition process(VAD) Song C.G.;Hwang J.H.
- Transactions of the Korean society of Mechanical Engineers, B v.24 no.3 Numerical investigation of contamination particle's trajectory in a head/slider disk interface Park H.S.;Hwang J.H.;Choa S.H.
- Proc.of the 34th IES Annual Technical Meeting Electrostatic effects in particle depositon onto product surfaces Fissan H.J.;Turner J.R.
- Proc of the 9th International Symposium on Contamination control Aerosol deposition on wafer surface Sakata S.;Inoue M.;Chirifu S.;Yoshida T.;Okada T.
- Proc. of the 34th IES Annual Technical Meeting Charge level on aerosol particles:measurement of particle charge and size distribution in disk drive Pui D.Y.H.;Tsai C.-J.;Liu B.Y.H.
- Transactions of the Korean Society of Mechanical Engineers, B v.26 no.2 Analysis on particle deposition on a heated rotating disk Yoo K.H.
- AIAA J. v.19 no.9 Instability and transition in rotating disk flow Malik M.R.;Wilkinson S.P.;Orszag S.A.
- Transactions of the Korean Society of Mechanical Engineers,B v.21 no.10 Analysis on particle deposition onto a heated, horizontal freestanding wafer with electrostatic effect Yoo K.H.;Oh M.D.;Myong H.K.
- Aerosol Science and Technology v.11 Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow Cooler D.W.;Peters m.H.;Miller,R.J.
- Numerical heat transfer and fluid flow Patankar S.V.
- J.Aerosol Science v.20 Numerical solution of aerosol dynamics for simultaneous convection, diffusion and external forces Stratmann F.;Whitby E.R.
- Proc.of the 13th International Symposium on Contamination Control Particle deposition velocities on a rotating wafer Ahn K.-H.;Bae G.N.;Lee C.S.
- J. Heat Transfer v.107 Local and average heat transfer characteristics for a disk situated perpendicular to a uniform flow Sparrow E.M.;Geiger G.T.
- Flow and heat transfer in rotating-disc systems rotor-stator systems Owen J.M.;Rogers R.H.