Proposal and Theoretical Verification on Motion Error Analysis Method of Hydrostatic Tables Using Transfer Function

전달함수을 이용한 유정압테이블 운동정밀도 해석법의 제안 및 이론적 검증

  • 박천홍 (한국기계연구원 자동화연구부 공작기계그룹) ;
  • 오윤진 (충남대학교 대학원) ;
  • 이찬홍 (한국기계연구원 자동화연구부 공작기계그룹) ;
  • 홍준희 (충남대학교 기계공학과)
  • Published : 2002.05.01

Abstract

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction farce is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geomatric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method(TFM). Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

Keywords

References

  1. 박천홍, 정재훈, 이후상, 김수태, 'FEM 을 이용한 유정압테이블의 운동정밀도해석(1. 단면지지형 테이블의 해석 및 실험적 검증),' 한국정밀공학회지, 제 17 권, 제 12 호, pp. 137-144, 2000
  2. 박천홍, 이후상, 김태형, 김민기, 'FEM을 이용한 유정압테이블의 운동정밀도해석(2. 양면지지형 테이블의 해석 및 실험적 검증),' 한국정밀공학회지, 제 19 권, 제 1 호, pp.65-70, 2002
  3. 靑山藤詞郞, '靜壓軸受-設計と應用,' 工業調査會, 1990