한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제15권4호
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  • Pages.367-372
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  • 2002
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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플라즈마 화학 기상 증착법에서 DC bias가 인가된 탄소나노튜브의 수직성장과 전계방출 특성

The Vertical Growth of CNTs by DC Bias-Assisted PECVD and Their Field Emission Properties.

  • 정성회 (충북대학교 재료공학과) ;
  • 김광식 (충북대학교 재료공학과) ;
  • 장건익 (충북대학교 재료공학과) ;
  • 류호진 (한국화학연구원 화학소재연구부)
  • 발행 : 2002.04.01
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초록

The vertically well-aligned carbon nanotubes(CNTs) were successfully grown on Ni coated silicon wafer substrate by DC bias-assisted PECVD(Plasma Enhanced Chemical Vapor Deposition). As a catalyst, Ni thin film of thickness ranging from 15~30nm was prepared by electron beam evaporator method. In order to find the optimum growth condition, the type of gas mixture such as $C_2H_2-NH_3$ was systematically investigated by adjusting the gas mixing ratio at $570^{\circ}C$ under 0.4Torr. The diameter of the grown CNTs was 40~200nm and the diameter of the CNTs increased with increasing the Ni particles size. TEM images clearly showed carbon nanotubes to be multiwalled. The measured turn-on field was $3.9V/\mu\textrm{m}$ and an emission current of $1.4{\times}10^4A/\textrm{cm}^2$ was $7V/\mu\textrm{m}$. The CNTs grown by bias-assisted PECVD was able to demonstrate high quality in terms of vertical alignment, crystallization of graphite and the processing technique at low temperature of $570^{\circ}C$ and this can be applied for the emitter tip of FEDs.

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참고문헌

  1. Nature v.354 helical microtubules of graphitic carbon S. Iijima https://doi.org/10.1038/354056a0
  2. Journal of Physical and Chemistry of Solids v.61 Mechanical and physical properties on carbon nanotube Sishen Xie;Wenzhi Li;Zhengwei Pan;Baohe Chang;Lianfeng Sun https://doi.org/10.1016/S0022-3697(99)00376-5
  3. Diamona and Related Materials v.10 Novel plasma chemical vapor deposition method of carbon nanotubes at low temperature for field emission display application Suk Jae Chung;Sung Hoon Lim;Choong Hun Lee;Jin Jang https://doi.org/10.1016/S0925-9635(00)00475-1
  4. Journal of Physics D-Applied Physics v.33 no.7 Carbon nanotubes in cathodic vaccum arc discharge H. Tatikawa;M. Yatsuki;T. Sakakibara;S. Itoh https://doi.org/10.1088/0022-3727/33/7/311
  5. Appl. Phys. Lett. v.76 no.2 In situ imaging and spectro-scopy of single-wall carbon nanotube synthesis by laser vaporization AA. Puretzky;DB. Geohegan;X. Fan;SJ. Penn Ycook https://doi.org/10.1063/1.125696
  6. Diamond and Related Materials v.10 Growth of carbon nanotubes by chemical vapor deposition M. Jung;K.Y. Eun;J.K. Lee;Y.J. Baik;K.R. Lee;J.W. Park https://doi.org/10.1016/S0925-9635(00)00446-5
  7. 전기전자재료학회논문지 v.14 no.10 플라즈마 화학 증착법을 이용한 탄소나노튜브의 촉매 성장에 관한 연구 정성회;장건익
  8. 전기전자재료학회논문지 v.14 no.10 유도 결합형 플라즈마 화학기상 증착법을 이용한 탄소나노튜브의 성장 및 전계방출 특성 연구 김광식;류호진;장건익
  9. Chemical Physics Lett. no.336 Single-wall carbon nano- tubes: a high yield of tubes through laser ablation of a crude-tube target M. Zhang;M. Yudasaka;S. Iijima
  10. 전기전자재료학회논문지 v.13 no.5 탄소나노튜브를 이용한 전계방출 디스플레이 최원봉;이내성;김종민
  11. Carbon v.39 Hydrogen storage capacity of carbon nanotubes, filaments, and vapor-grown fibers G.G. Tibbetts;G.P. Meister;C.H. Olk https://doi.org/10.1016/S0008-6223(01)00051-3
  12. Carbon v.39 Growth and structure of carbon nanotubes produced by thermal chemical vapor deposition C.J. Lee;J. Park https://doi.org/10.1016/S0008-6223(00)00311-0
  13. Chemical Physics Lett. no.323 Growth of well-aligned carbon nanotubes on a large area of Co-Ni co-deposited silicon oxide substrate by thermal chemical deposition C.J. Lee;J. Park;S.Y. Kang;J.H. Lee
  14. Materials Lett. v.51 Electric doublelayer capacitors using carbon nanotubes electrodes and organic electrolyte B. Zhang;J. Liang;C.L. Xu;B.Q. Wei;D.B. Ruan;D.H. Wu https://doi.org/10.1016/S0167-577X(01)00352-4
  15. Journal o Phys. and Chem. of Solids v.62 Metal semiconductor transition under uniaxial stress for single and double-walled carbon nanotubes A. Charlier;E. McRae;R. Heyd;M.F. Charlier https://doi.org/10.1016/S0022-3697(00)00074-3