References
- The Stopping and Ranges of Ions in Matter v.3 Hydrogen Stopping Power and Ranges in all Elements H.H. Andersen;J.F. Ziegler;J.F. Ziegler(ed.)
- The Stopping and Ranges of ions in Matter v.6 Handbook of Range Distributions for Energetic Ions in all Elements U. Littmark;J.F. Ziegler;J.F. Ziegler(ed.)
- The Science & Engineering of Microelectronic Fabrication(2nd ed.) S.A. Campbell
- ULSI Devices C.Y. Chang;S.M. Sze
- Introduction to Semiconductor Manufacturing Technology Hong Xiao
- Silicon VLSI Technoly James D. Plummer;Michael D. Deal;Peter B. Griffin
- Technologie Hochintegrierter Schaltungn D. Widmann;H. Mader;H. Friedrich
- 전기전자재료학회논문지 v.10 no.9 실리콘에 MeV로 이온주입된 인의결함분포와 profile에 관한 연구 정원채
- 전기전자재료학회논문지 v.12 no.1 비정질실리콘에 인의도핑과 이온주입에 따른 농도분포에 대한 연구 정원채
- 전기전자재료학회논문지 v.13 no.1 JBS 정류기의 PN접합구조에 따른 I-V 특성에 관한 연구 안병목;정원채
- Nucl. Inst. Meth. v.174 no.2 A monte carlo computer program for the transport of energetic ions in amorphous targets J.P. Biersack;L.G. Haggmark https://doi.org/10.1016/0029-554X(80)90440-1
- Computer Simulation of Ion-Solid Interactions W. Eckstein
- The Stopping and Range of Ions in Solids J.F. Ziegler;J.P. Biersack;U. Littmark
- J. Appl. Phys. v.85 no.3 The stopping of energetic light ions in elemental matter J.F. Ziegler https://doi.org/10.1063/1.369844
- Nucl. Inst. Meth. v.B35 no.2 The stopping of ions compounds J.F. Ziegler;J.M. Manoyan https://doi.org/10.1016/0168-583X(88)90273-X
- SRIM 2000 manual J.F. Ziegler
- Nucl. Inst. Meth. v.2 no.3 Ion implantation into non-planar targets: monte carlo simulations and analytical models H. Ryssel;J. Lorenz;W. Kruger https://doi.org/10.1016/S0168-583X(87)80012-5
- Fraunhofer Institut fur Integrierte Schaltungen(ⅡS-B) ICECREM 1996 manual User'Guide