IBM J.Res. Dev.
v.13
Micromechanical membranc switches on silicon
Petersen K.E.
A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz, Tech. Digest, 8th Int.Conf. on Solid-State Sensors and Actuators
Yao J. J.;Chang M. F.
IEEE Microwave Theory and Techniques Symp.
Charactcristics of micromachined switches at microwave frequencies Tech. Digest
Goldsmith C.;Randall J.;Eshelman S.;Lin T-H
A micromachined variable capacitor for monolithic low-noise VCOs, Tech.Digest, Solid State Sensor and Actuator Workshop
Young D.J.;Boser B.E.
Micromachined varactor with wide tuning range Electron Lett
v.33
Dec A.;Suyama K.;Micromachined
IEEE Microwave Theory and Techniques Symp
Micromachined RF MEMS Tunable Capacitors using Piezoelectric Actuators, Tech.Digest
Jae Y.Park;Young J.Yee;Hyo J.Nam;Jong U.Bu
Appl.Phys. Letter
v.31
no.8
Micromechanical light modulator array fabricated on silicon
K.E.Peterson
Electronics Letter
v.31
no.23
Micro-opto michanical switch intergrated on silicon
E.Ollier;P.Labeye;F.Revol
Jr. of Micromechanical Systems
v.2
no.4
Electroststic microtorsion mirrors for an optical switch matrix
H.Toshiyoshi;Hiroyuki Fujita
Late-news prster session supplemental digest of Solid State Sensor and Actuator Worshop Hilton Head, South Carolina
3.5Mbit/sec. MARS modulator system performance for RTTH applications
J.A.Walker;P.P.Iannone;W.M.McDonald;R.Ruel;R.Boie;S.C.Arney;N.J.Frigo;D.J.Bishop