차세대 IT산업에 MEMS기술의 응용

  • 박재영 (마이크로시스템 그룹, 소자재료 연구소, 엘지전자기술원) ;
  • 부종옥 (마이크로시스템 그룹, 소자재료 연구소, 엘지전자기술원)
  • Published : 2002.01.01

Abstract

Keywords

References

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