센서학회지 (Journal of Sensor Science and Technology)

  • 제11권3호
  • /
  • Pages.155-162
  • /
  • 2002
  • /
  • 1225-5475(pISSN)
  • /
  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
권호 표지
DOI QR코드

DOI QR Code

SnO2-ZnO계 후막센서 구조에 따른 CO 감지 특성

CO Sensing Properties in Layer structure of SnO2-ZnO System prepared by Thick film Process

  • 박보석 (조선대학교 재료공학과) ;
  • 홍광준 (조선대학교 물리학과) ;
  • 김호기 (한국과학기술원 재료공학과) ;
  • 박진성 (조선대학교 재료공학과)
  • 발행 : 2002.05.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

CO 기체 감지 특성을 향상시키기 위해서 3 mol% ZnO를 첨가한 $SnO_2$와 3mol% $SnO_2$를 첨가한 ZnO의 적층 형태를 변화시켜 연구하였다. 적층 구조는 단일층, 복층, 그리고 이종층 구조로 후막 인쇄법을 사용하여 제작하였다. $SnO_2$-ZnO계에서 제 2상은 발견되지 않았다. 전도성은 $SnO_2$에 ZnO를 첨가하면 감소하고, ZnO에 $SnO_2$를 첨가하면 증가하였다. 측정 온도증가와 CO 기체 유입으로 전도성은 증가하였다. 단층 및 복층의 후막센서 구조의 감도 향상은 없었으나, $SnO_2$ 3ZnO-ZnO $3SnO_2$/substrate 구조의 이종층 센서의 감도는 향상되었다. 센서 구조에 관계없이 I-V 변화는 모두 직선성을 나타내서 Ohmic 접합 특성을 이루고 있었다.

The sensing properties of carbon monooxide were investigated as a function of mixing ratio and the lamination structure of 3mol% ZnO-doped $SnO_2$ and 3mol% $SnO_2$-doped ZnO. The lamination structures were fabricared monolayer, double layer, and hetero layer of $SnO_2$, Zno, and theirs mixture composition using thick film process. There was no second phase by the reaction of $SnO_2$ and ZnO. The conductance was decreased by the addition of ZnO in $SnO_2$, but it was increased with the addition of $SnO_2$ in ZnO. The conductance was increased with temperature and the inlet of CO. There was no improvement of sensitivity in the structure of mono- and double-layer. The hetero-layer structure, however, of $SnO_2$ 3ZnO-ZnO $3SnO_2$ showed the higher resistivity and the highest sensitivity. Ohmic characteristics was confirmed by the linear properties for I-V measurements.

키워드

참고문헌

  1. J. H. Yu, G. M. Choi, 'Electrical and CO gas sensing properties of $ZnO-SnO_2$ composites,' Sens. Act. B, vol 52, pp. 251-256, 1998 https://doi.org/10.1016/S0925-4005(98)00275-5
  2. H. Nanto et al.. 'Doping effect of $SnO_2$ on gas sensing characteristics of sputtered ZnO thin film chemical sensor,' Sens. Act. B, vol. 35-36 pp. 384-387. 1996
  3. T. W. Kim, U. S. Choi. S. T. Jun 'The Changes of CO Gas Sensing Properties of ZnO and $SnO_2$ with Addition $TiO_2$,' Kor. J. Mater. Res., vol. 8(4), pp. 312-316, 1998
  4. J. H. Yu, G. M .Choi, 'Selective CO gas detection of CuO- and ZnO-doped gas $SnO_2$ sensor,' Sens. Act B, vol. 75, pp. 56-61, 2001 https://doi.org/10.1016/S0925-4005(00)00742-5
  5. J. H. Yu, G. M .Choi, 'Electrical and CO gas-sensing properties of ZnO/$SnO_2$ hetero-contact,' Sens Act. B. vol 61, pp. 59-67, 1999 https://doi.org/10.1016/S0925-4005(99)00280-4
  6. K . Ihokura and J. Watson, 'The Stannic Oxide Gas Sensor - Prin ciples and Applications,' CRC PressBoca Raton, FL, 1994
  7. D. H. Yoon. J. H. Yu, G. M. Choi 'CO gas sensing properties of ZnO-CuO composite,' Sens. Act. B,vol 46, pp. 15-23. 1998 https://doi.org/10.1016/S0925-4005(97)00317-1
  8. W. Fliegel.W. Fliegel, G. Behr, J Werner and G. Krabbes, 'Preparation,development of microstructure. ele-ctrical and gas-sensitive properties of pure and doped $SnO_2$ powders,' Sens. Act. B, vol. 18-19, pp. 474-477, 1994
  9. W. Liu, X. Cao, Y. Zhu and L. Cao, 'The effect of dopants on the electronic structure of $SnO_2$ thin film,' Sens. Act. B, vol. 66, pp. 219-221 2000 https://doi.org/10.1016/S0925-4005(00)00347-6
  10. I. S. Bae et al., 'Properties of Fe_2O_3-doped $SnO_2$ Oxides for CO Sensor,' The Kor. Sens. Soc.. vol 10(4). pp. 16-25. 2001
  11. J. H. Yu. G. M. Choi. 'Current voltage characteristics and selec tive CO detection of $Zn_2Sn0_4$ and $Zn0/Zn_2SnO_4$, $SnO_2/Zn_2SnO_4$ layer-ed-type sensors.' Sens. Act. B, vol. 72, pp. 141-148, 2001 https://doi.org/10.1016/S0925-4005(00)00642-0
  12. S. J. Jung, H. Yanagida. 'The characterization of a CuO/ZnO hetero contact-type gas sensor having selectivity for CO gas, Sens. Act. B. vol. 37, pp. 53-60 1996
  13. K. K. Baek, Harry L. Tuller. 'At mosphere sensitive CuO/ZnO jun-ctions,' Solid State lonics. vol. 75pp. 179-186, 1995 https://doi.org/10.1016/0167-2738(94)00172-O
  14. N. Yamazoe, J. Tamaki, N. Miura 'Role of hetero-junctions in oxide semiconductor gas sensors,' MaterSci. Eng. B, vol 41, pp. 178-181 1996 https://doi.org/10.1016/S0921-5107(96)01648-0
  15. Wei Wang, Shengyue Wang. XiaorenPan, 'Deposition and characteriz-ation of zinc oxide and tin oxide ultrafine particle bilayer thin films,' Thin Solid Films, vol. 345, pp. 212-216, 1999 https://doi.org/10.1016/S0040-6090(98)01088-8
  16. Robert C. Weast. 'CRC Handbook of Chemistry and Physics,' CRC Press, FL. pp, B-140, 144, 195, F-157, 1986-1987