Clean Technology (청정기술)

The Korean Society of Clean Technology (한국청정기술학회)
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A study on the optimized coagulation for separation of liquid and solid from CMP waste

CMP 폐액의 고액 분리를 위한 최적 응집조건에 관한 연구

  • Hong, Seongho (Department of Chemical and Environmental engineering, Soongsil University) ;
  • Oh, Suckhwan (Department of Chemical and Environmental engineering, Soongsil University)
  • 홍성호 (숭실대학교 환경.화학공학과) ;
  • 오석환 (숭실대학교 환경.화학공학과)
  • Published : 2001.03.01
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Abstract

The waste slurry generated from CMP process contains particulate and heavy metals. It is hard to treat the waste slurry by conventional treatment method because the particulates in the waste are too fine to be easily separated the solid from the waste for the purpose of water recycling. The investigation was focused on finding the optimum condition of coagulation with two different coagulants. When the solid content in the waste slurry solution was 0.1wt%, the optimal ranges of pH and PACl concentration were 4~6 and 20~50 mg/L, respectively. When the solid content was increased to 0.5wt%, the optimal condition was 4~5 for pH and 50~100 mg/L for PACl concentration.

CMP공정에서 발생되는 slurry는 다량의 입자성 물질과 중금속을 함유하고 있다. 이 폐 slurry는 응집성과 침강성에 문제가 있어 처리에 어려움이 있다. 따라서, 본 연구에서는 PACI과 Alum을 이용한 Jar-tester를 통하여 용수 재활용을 위한 최적 응집 조건을 도출하고자 하였다. 고형물 함량이 0.1wt%의 경우 PACI을 응집제로 사용할 때 최적 응집 조건은 pH 4 부터 6에서 투여량은 20~50 mg/L 였으며, 0.5 wt%의 경우 pH 4와 5에서 응집제 투여량은 50~100 mg/L였다.

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