한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제34권6호
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- Pages.531-536
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
기판온도에 따른 Co-22%Cr 합금박막의자가정렬형 나노구조
Self-Organized Nano Structure in Co-22% Cr Alloy Thin Films with Substrate Temperatures
초록
Co-22 %Cr alloy films are promising for high-density perpendicular magnetic recording media with their perpendicular anisotropy and large coercivity of 3000 Oe. We observed that a self organized nano structure (SONS) of fine ferromagnetic Co-enriched phase and paramagnetic Cr-enriched phase appears inside the grain of Co-Cr magnetic alloy thin films at the elevated substrate temperature after do-sputtering. The periodic fine Co-enriched phase and Cr-enriched phase is the plate shape of 80 (equation omitted)-wide and 1000 (equation omitted)-long. Cr-enriched phases are located at the center of grains. We prepared 5000 (equation omitted) -thick Co-22 %Cr films on polyimide substrate with varying substrate temperature of
키워드