Abstract
We calibrated a capacitance diaphragm gauge(CDG) of 1,333 Pa range by using ultrasonic interferometer manometer (UIM) that was a national low vacuum standards system. And its uncertainties were evaluated according to International Organization for Standardization(ISO), they were named to A type uncertainty, B type uncertainty, combined standard uncertainty, and expanded uncertainty, We obtained that the combined standard uncertainties were $1.38 \times10^{-2}\; Pa\sim3.03 \times10^{-1} $Pa and the relative uncertainties(combined standard uncertainty/standard pressure) were $2.3 \times 10^{-4}\;Pa\sim7.9 X\times10^{-3} $Pa for this 1,333 Pa CDG.
1,333 Pa 용량의 용량형진공계를 저진공 국가표준기인 초음파간섭 수은주압력계(ultrasonic interferometer manometer)를 이용하여 교정하였다. 이 결과의 불확도를 국제표준화기구의 권고안의 A형 불확도, B형 불확도, 합성표준불확도, 확장불확도 등으로 구분하여 평가하였다. 표준압력 1.76 Pa~1.31$\times$$10^3$Pa에서의 합성표준불확도는 $1.38 \times10^{-2}\; Pa\sim3.03 \times10^{-1} $Pa이었으며, 상대불확도(합성표준불확도/표준압력)는 $2.3 \times 10^{-4}\;Pa\sim7.9 X\times10^{-3} $Pa 이었다.
