한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제34권5호
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- Pages.409-413
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
High rate magnetron sputtering of thick Cr-based tribological coatings
- Bin, Jin H. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Nam, Kyung H. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Boo, Jin H. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Han, Jeon G. (Center for Advanced Plasma Surface Technology, SungKyunKwan University)
- 발행 : 2001.10.01
초록
In this study, high rate deposition of thick CrNx films was carried out by crossed field unbalanced magnetron sputtering for the special application such as piston ring employed in automobile engine. For the high rate deposition and thick CrNx films formation with thickness of 30
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