Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 34 Issue 5
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- Pages.409-413
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
High rate magnetron sputtering of thick Cr-based tribological coatings
- Bin, Jin H. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Nam, Kyung H. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Boo, Jin H. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Han, Jeon G. (Center for Advanced Plasma Surface Technology, SungKyunKwan University)
- Published : 2001.10.01
Abstract
In this study, high rate deposition of thick CrNx films was carried out by crossed field unbalanced magnetron sputtering for the special application such as piston ring employed in automobile engine. For the high rate deposition and thick CrNx films formation with thickness of 30
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