Journal of the Optical Society of Korea

  • 제5권2호
  • /
  • Pages.60-66
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  • 2001
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  • 1226-4776(pISSN)
  • /
  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
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Development of Prototype Stylus Prototype for Large Optics Testing

  • 투고 : 2000.12.15
  • 발행 : 2001.06.01
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초록

The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.

키워드

참고문헌

  1. L. Allen, J. R. P. Angle, J. D. Mogus, G. A. Rodney, R. R. Shannon, and C. P. Spoelhof, The Hubble Space Telescope optical systems failure report. (NASA, 1990)
  2. J. F. Song and T. V. Vorburger, Appl. Opt. 30, 42 (1991) https://doi.org/10.1364/AO.30.000042
  3. F. Kratz, G. Ringel, H. Tobben, and D. R. Schmitt, Proc. SPIE 2775, 263 (1996) https://doi.org/10.1117/12.246753
  4. V. Y. Mendeleyev, Appl. Opt. 36, 9005 (1997) https://doi.org/10.1364/AO.36.009005
  5. K. A. O'Donnell, Appl. Opt. 32, 4922 (1993) https://doi.org/10.1364/AO.32.004922
  6. E. Hansen, Gemini Telescope f/16 optical design summary (1994)
  7. H. S. Yang, Developments in Stylus Profilometry (Ph.D. dissertation, University College London, 1999), 49
  8. P. B. Leadbeater, W. J. Wills-Moren, Proc. SPIE 1333, 183 (1990) https://doi.org/10.1117/12.22803
  9. D. J. Whitehouse, Handbook of surface metrology (IOP,1994)
  10. A. L. Gauler, Opt. Eng. 21, 991 (1982)
  11. G. W. C. KAYE, T. H. Laby, Tables of physical and chemical constants (Longman, 16th edition)

피인용 문헌

  1. A New Full-Aperture Reflective Null Measuring Method for Conformal Dome vol.20, pp.1, 2016, https://doi.org/10.3807/JOSK.2016.20.1.174
  2. A swing arm method for profile measurement of large optical concave surfaces in the lapping process vol.29, pp.1-2, 2006, https://doi.org/10.1007/s00170-004-2473-0