참고문헌
- Wear v.200 Surface engineering and microtribology for microelectro mechanical systems K. Komvopoulos
- J. Vac. Sci. Technol. B v.15 Critical review: Adhesion in surface micromechanical structure R. Maboudian;R.T. Howe
- Microelectronics Reliablility v.39 Failure modes in surface micromachined microelectro mechanical atuation systems S.L. Miller;M.S. Rodgers;G. La Vigne;J.J. Snie-gowski;P.Clews;D.M. Tanner;K.A. Peterson
- Proc. SPIE Micromachined Devices and Components Ⅲ v.3224 Routes to failure in rotating MEMS devices experiencing sliding friction S.L. Miller;G. La Vigne;M.S. Rodgers;J.J. Sine-gowski;J.P. Waters;P.J. McWhorter
- Micromachining and Microfabrication Symp., Proc. of SPIE v.3512 Linkage design effect on the reliability of surface micromachined microengines driving a load D.M. Tanner;K.A. Peterson;L.W. Irwin;P. Tangyun-yong;W.M. Miller;W.P. Eaton;N.F. Smith;M.S. Rodgers
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Tribology Letters
v.3
Lubrication of digital micromirror
$devices^{TM}$ S.A. Henck - 22nd Int. Conf. in Microelectronics Reliability of surface micromachined microelectro mechanical actuators D.M. Tanner
- Thin Solid Films v.353 Atomic force microscopy of in-situ defermed nickel thin films C. Coupeau;J.F. Naud;F. Cleymand;P.Goudeau;J. Grilhe
- Langmuir v.12 Organic molecular films under shear forces: Fluid and solid lanmuir monolayers V.V. Tsukruk;V.N. Bliznyuk;J. Hazel;D. Visser
- ASME J. of Tribology v.120 Nanotribological properties of organic boundary lubricants: Langmuir films versus self-assembled monolayers V.N. Bliznyuk;M.P. Everson;V.V. Tsukruk
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Langmuir
v.13
Systematic studies of the firctional properties of fluorinated monolayers with atomic force microscopy: Comparison of
$CF_{3-}$ and$CH_{3-}$ terminated films H.I. Kim;T. Koini;T.R. Lee;S.S. Perry - Langmuir v.15 Sticky molecular surfaces: Epoxysilane self-assembled mono-layers V.V. Tsukruk;I. Luzinov;D. Julthongopiput
- Langmuir v.16 Epoxy-terminated self-assembled monolayers: Molecular glues for polymer layers I. Luzinov;D. Julthongpiput;A. Liebmann-Vinson;T. Cregger;M.D. Foster;V.V. Tsukruk
- Tribology International v.34 Nanotribogical behavior of tethered reinforced polymer nanolayer coatings I. Luzinov;D. Julthongpiput;V. Gorbunov;V.V. Tsukruk
- Macromol. Symp. Bilayer nanocomposite molecular coatings from elastomeric/rigid polymers: Fabrication, morphology, and micromechanical properties I. Luzinov;D. Julthongpiput;P.D. Bloom;V.V. Sheares;V.V. Tsukruk