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다양한 유기분자막의 마찰특성 비교

Comparison of the Tribological behaviors of Various Organic Molecular Films

  • 김두인 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 안효석 (한국과학기술연구원 트라이볼로지연구센터) ;
  • 김충현 (한국과학기술연구원 트라이볼로지연구센터) ;
  • ;
  • ;
  • ;
  • V. Tsukruk (Dept. Material Science and Eng., Iowa State University)
  • 발행 : 2001.10.01

초록

Monolayers such as self-assembled monolayer (SAM) have received considerable attention to reduce stiction and friction in micro-devices and microelectromechanical systems (MEMS). Various organic molecular films were investigated to obtain better understanding of their tribological behaviors and adhesion property. The organic molecular films studied in this work are: epoxysilane SAMs, octadecyltricholosilane (OST), multi-layers composed of epoxysilane SAMs, poly[styrene-b-(ethylene-co-butylene)-b-styrene](SEBS) and compound of epoxy resin and poly (paraphenylene)(EP/PPP). The pull-off forces of these films were also obtained from force-distance curves measured in static mode of operation of atomic force microscope(AFM). Tribological tests were conducted with a ball-on-flat reciprocating friction tester. The OST showed the lowest pull-off force, indicating its low adhesion property. It was revealed that, the OST, EP/PPP and the multi-layer of epoxysilane SAMs, SEBS and EP/PPP exhibited good tribological properties at the lower load (0.3 N) whereas the OST showed best performance at the higher load (1.8 N).

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참고문헌

  1. Wear v.200 Surface engineering and microtribology for microelectro mechanical systems K. Komvopoulos
  2. J. Vac. Sci. Technol. B v.15 Critical review: Adhesion in surface micromechanical structure R. Maboudian;R.T. Howe
  3. Microelectronics Reliablility v.39 Failure modes in surface micromachined microelectro mechanical atuation systems S.L. Miller;M.S. Rodgers;G. La Vigne;J.J. Snie-gowski;P.Clews;D.M. Tanner;K.A. Peterson
  4. Proc. SPIE Micromachined Devices and Components Ⅲ v.3224 Routes to failure in rotating MEMS devices experiencing sliding friction S.L. Miller;G. La Vigne;M.S. Rodgers;J.J. Sine-gowski;J.P. Waters;P.J. McWhorter
  5. Micromachining and Microfabrication Symp., Proc. of SPIE v.3512 Linkage design effect on the reliability of surface micromachined microengines driving a load D.M. Tanner;K.A. Peterson;L.W. Irwin;P. Tangyun-yong;W.M. Miller;W.P. Eaton;N.F. Smith;M.S. Rodgers
  6. Tribology Letters v.3 Lubrication of digital micromirror $devices^{TM}$ S.A. Henck
  7. 22nd Int. Conf. in Microelectronics Reliability of surface micromachined microelectro mechanical actuators D.M. Tanner
  8. Thin Solid Films v.353 Atomic force microscopy of in-situ defermed nickel thin films C. Coupeau;J.F. Naud;F. Cleymand;P.Goudeau;J. Grilhe
  9. Langmuir v.12 Organic molecular films under shear forces: Fluid and solid lanmuir monolayers V.V. Tsukruk;V.N. Bliznyuk;J. Hazel;D. Visser
  10. ASME J. of Tribology v.120 Nanotribological properties of organic boundary lubricants: Langmuir films versus self-assembled monolayers V.N. Bliznyuk;M.P. Everson;V.V. Tsukruk
  11. Langmuir v.13 Systematic studies of the firctional properties of fluorinated monolayers with atomic force microscopy: Comparison of $CF_{3-}$ and $CH_{3-}$ terminated films H.I. Kim;T. Koini;T.R. Lee;S.S. Perry
  12. Langmuir v.15 Sticky molecular surfaces: Epoxysilane self-assembled mono-layers V.V. Tsukruk;I. Luzinov;D. Julthongopiput
  13. Langmuir v.16 Epoxy-terminated self-assembled monolayers: Molecular glues for polymer layers I. Luzinov;D. Julthongpiput;A. Liebmann-Vinson;T. Cregger;M.D. Foster;V.V. Tsukruk
  14. Tribology International v.34 Nanotribogical behavior of tethered reinforced polymer nanolayer coatings I. Luzinov;D. Julthongpiput;V. Gorbunov;V.V. Tsukruk
  15. Macromol. Symp. Bilayer nanocomposite molecular coatings from elastomeric/rigid polymers: Fabrication, morphology, and micromechanical properties I. Luzinov;D. Julthongpiput;P.D. Bloom;V.V. Sheares;V.V. Tsukruk