Characteristics of Copper Plating Solutions for Electroforming of Microcircuit

미세 배선 성형을 위한 전주용 동도금액의 특성

  • Published : 2001.10.01

Abstract

In order to obtain the basic data on the optimum conditions of electroforming process for fabricating the micro wiring pattern for plate type micro- motor core, characteristics of plating bath and properties of deposits were studied with various copper plating baths which contain sulfate, fluoborate, pyrophosphate and cyanide salt, respectively. Cathodic polarization, throwing power, internal stress, texture and surface morphology of deposits were observed. Throwing power of plating solution is deeply related to the polarization curves and the values are in the range of +20∼20%. The order of values ate as follows- pyrophosphate, cyanide, sulfate and fluoborate bath. Internal stresses of deposits are tensile in all of the copper plating bath. Thickness of the deposits plated at the center of holes has the highest value in the pyrophosphate bath and K factor, ratio of height and width of deposit, is 1.44. It was confirmed that the pyrophosphate bath was the best one for the electroforming of wire pattern.

Keywords

References

  1. P. Y. Hu, J. of Engineering for Industry, May, 541 (1974)
  2. B. E. Hall, Control & Instrumentation, April, 44 (1973)
  3. S. A. Watson, Trans. Inst. Met. Finish., 37, 28 (1960)
  4. 田中啓介, 表面技術, 43(7), 624 (1992)
  5. F. A. Lowenheim, 'Modern Electroplating' pl88, John Wiley & Sons, Inc. (1974)
  6. 寺文龍一, 長坂秀雄, 金屬表面技術, 27 (12), 676 (1976)
  7. R. Weil, Plating, 58(2), 137 (1971)
  8. N. Takeuchi and N. Hatanaka, J. Met.Finish. Soc. Japan, 36 (9), 409 (1985)
  9. D.Y. Chang, S. C. Kwo and K. Masui, in Proc. of Asian Surf. Finish. Forum (Seoul, Korea, Sept. 1989) p.151, ed. D.N. Lee.