References
- S. Wolf, 'Silicon Processing for the VLSI era', Lat-tice Press, (1995)
- S.M. Sze, 'Semiconductor devices', McGraw-Hill, (1985)
- S.M. Sze, 'VLSI Technology', John Wiley & Sons, (1988)
- C.M. Osburn, J.Y. Tsai and J. Sun, J. Electron. Mater. 25, 1725 (1996) https://doi.org/10.1007/s11664-996-0028-x
- T. Ohguro et al., IEEE T-ED'94, 2305, 1994 https://doi.org/10.1109/16.337443
- J.B. Laskey, J.S. Nakos, O.J. Chan and P.J. Geiss, IEEE Trans. Electron Dev., 38, 262 (1991) https://doi.org/10.1109/16.69904
- T. Ohguro et al., Electrochem. Society Sympo, 1997
- S.J. Hilenius, H.I. Cong, J. Lebowitz, J.M. Andrews, R.L. Field, L. Manchanda, W.S. Lindenberger, D.M. Boulin and W.T. Lynch, A bs. 132, The Electrochem. Soc. Ext. A bs. 89-1, 184 (1989)
- M.L.A. Dass, D.B. Fraser, and C.S. Wei, Appl, Phys. Lett. 58 (12), 1308 (1991) https://doi.org/10.1063/1.104345
- T. Morimoto et al., IEEE Trans. Electron Dev., 42, 915 (1995) https://doi.org/10.1109/16.381988
- T. Ohguro et al., IEDM'95, 453 (1995) https://doi.org/10.1109/IEDM.1995.499236
- F. Deng, R.A. Johnson, P.M. Asbeck, S.S. Lau, W. B. Dubbelday, T. Hsiao and J. Woo, J. Appl. Phys. 81 (12), 8047 (1997) https://doi.org/10.1063/1.365410
- S.J. Nagtel, I. Coulthard, T.K. Sham, D.X. Xu, L Erickson and S.R. Das, Appl. Phys. Lett. 74(19) 2893 (1999) https://doi.org/10.1063/1.124049
- B.A. Julies, D. Knoesen, R. Pretorius and D Adams, Thin Solid Films 347, 201 (1999) https://doi.org/10.1016/S0040-6090(99)00004-8
- A.E. Morgan, E.K. Broadbent, K.N. Ritz, D.K. Sadana and B.J. Burow, J. Appl, Phys, 64, 344 (1988) https://doi.org/10.1063/1.341434
- C.Y. Ting, M. Wittmer, S.S. Iyer and S.B. Brodsky, J. Electrochem. Soc. 131, 2934 (1984) https://doi.org/10.1149/1.2115445
- N.S. Parekh. H. Roede, A.A. Bos, A.G.M. Jonkers and R.D.J. Verhaar, IEEE Trans. Elec. Dev. ED-39, 88 (1991) https://doi.org/10.1109/16.65740
- G.J.P. Krooshof, F.H.P.M. Habraken, W.F. van der Weg, L. Van den hovw, K. Maex and R.F. De Keersmaecker, J. Appl, Phys. 63, 5110 (1988) https://doi.org/10.1063/1.340411