Korean Membrane Journal

The Membrane Society of Korea (한국막학회)
권호 표지

Hydrogen-Permselective TiO$_2$2/SiO$_2$2 Membranes Formed by Chemical Vapor Deposition

  • Nam, Suk-Woo (Fuel Cell Research Center Korea Institute of Science and Technology) ;
  • Ha, Heung-Yong (Fuel Cell Research Center Korea Institute of Science and Technology) ;
  • Yoon, Sung-Pil (Fuel Cell Research Center Korea Institute of Science and Technology) ;
  • Jonghee Han (Fuel Cell Research Center Korea Institute of Science and Technology) ;
  • Lim, Tae-Hoon (Fuel Cell Research Center Korea Institute of Science and Technology) ;
  • Oh, In-Hwan (Fuel Cell Research Center Korea Institute of Science and Technology) ;
  • Seong- Ahn Hong (Fuel Cell Research Center Korea Institute of Science and Technology)
  • Published : 2001.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

Films of TiO$_2$/SiO$_2$ were deposited on the inner surface of the porous glass support tubes by decomposition of tetraisopropyl titanate (TIPT) and tetraethyl orthosilicate (TEOS) at atmospheric pressure. Dense and hydrogen -permselective membranes were formed at 400-600$\^{C}$. The permeation rates of H$_2$ through the membrane at 600$\^{C}$ were 0.2-0.4 ㎤(STP)/min-㎠ atm and H$_2$:N$_2$permeation ratios were above 1000. The permeation properties of the membranes were investigated at various deposition temperatures and TIPT/TEOS concentrations. Decomposition of TIPT alone at temperatures above 400$\^{C}$ produced porous crystalline TiO$_2$ films and they were not H7-selective. Decomposition of TEOS produced H$_2$-permeable SiO$_2$ films at 400-600$\^{C}$ but film deposition rate was very low. Addition of TIFT to the TEOS stream significantly accelerated the deposition rate and produced highly H$_2$-selective films. Increasing the TIPT/TEOS concentration ratio increased the deposition rate. The TiO$_2$/SiO$_2$ membranes formed at 600 $\^{C}$ have the permeation properties comparable to those of SiO$_2$ membranes produced from TEOS.

Keywords