Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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A Study on the Implementation of the DC Characteristic Measurement System for Semiconductor Devices

반도체 소자의 직류특성 측정 시스템의 구현에 관한 연구

  • Park, In-Kyu (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Shim, Tae-Eun (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Jeong, Hae-Yong (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Kim, Jae-Chul (School of Electronic & Electrical Engineering, Kyungpook National University) ;
  • Park, Jong-Sik (School of Electronic & Electrical Engineering, Kyungpook National University)
  • 최인규 (경북대학교 전자전기공학부) ;
  • 심태은 (경북대학교 전자전기공학부) ;
  • 정해용 (경북대학교 전자전기공학부) ;
  • 김재철 (경북대학교 전자전기공학부) ;
  • 박종식 (경북대학교 전자전기공학부)
  • Published : 2001.10.01
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Abstract

In this paper, we design and implement the DC characteristic measurement system for semiconductor devices. The proposed system is composed of 4 SMU(Source and Measure Unit) channels. Various efforts in hardware and software have been made to reduce the measurement errors. Internal and external sources of errors in measurement system especially in pA range measurement have been identified and removed. Also, various digital signal processing techniques are developed. Calibration is executed under the control of microprocessor periodically. Experimental results show that the implemented system can measure the DC characteristic of semiconductor devices with less than 0.2% error in various voltage and current source/measurement range.

Keywords

References

  1. S. J. Wang, J. Y. Lee, and C. Y. Chang, 'An efficient and reliable approach for semiconductor device parameter extraction,' IEEE Trans. on CAD, vol. CAD-5, no. 1, Jan., 1986
  2. M. Kondo, H. Onodera, and K. Tamaru, 'A model-adaptable MOSFET parameter extraction system,' Proc. ASPDAC'95/CHDL'95/VLSI'95., pp. 373-377, Aug. 1995 https://doi.org/10.1145/224818.224926
  3. A. Ortiz-Conde, F.J. Garcia Sanchez, et. al., 'A method to extract parameters in a generalized two-terminal device,' Southcon'94, pp. 262-265, Mar. 1994 https://doi.org/10.1109/SOUTHC.1994.498112
  4. D. Kirsop and J. Yeager, 'Design considerations in low level analog test systems,' AUTOTESTCON'90 Conf. Record, pp. 577-582, 1990 https://doi.org/10.1109/AUTEST.1990.111564
  5. Henry W. Ott, Noise reduction techniques in electronic systems, 2nd ed., Wiley, 1989
  6. Gene C., C. Chen, Winifred Y., C. Lin, et. al., 'Accurate self-checking digital teraohmmeter,' IEEE Trans. Instrum. Meas., vol. 44, no. 2, Apr. 1995 https://doi.org/10.1109/19.377807
  7. M. F. Lai, Y.-P. Wu, G. C. Hsieh, and J. L. Lin, 'Design and implementation of a microprocessor-based intelligent electronic meter,' ICIT'94 Conf. Record, pp. 268-272, Dec. 1994 https://doi.org/10.1109/ICIT.1994.467115
  8. Kolen P. T., 'Self-calibration/compensation technique for microcontroller-based sensor arrays,' IEEE Trans. Instrum. Meas., vol. 43, no. 4, pp. 620-623, Aug. 1994 https://doi.org/10.1109/19.310177
  9. Ji-Gou Liu, U. Fruhauf, and A. Schonecker, 'On the application of special self-calibration algorithm to improve impedance measurement by standard measuring systems,' Proc. IMTC'99, vol. 2, pp. 1017-1022, 1999 https://doi.org/10.1109/IMTC.1999.777014
  10. D. A. Bell, Operational amplifiers : Applications, Troubleshooting, and Design, Prentice-Hall, 1990